5/14/2011	4:19:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2011	4:19:58 PM	Recipe started at 4:19 PM
5/14/2011	4:19:58 PM	H2 valve closed
5/14/2011	4:19:58 PM	BCl3 valve closed
5/14/2011	4:19:58 PM	PH3 valve closed
5/14/2011	4:19:58 PM	SiCl4 pre valve closed
5/14/2011	4:19:58 PM	SiCl4 post valve closed
5/14/2011	4:19:58 PM	Main Vac valve closed
5/14/2011	4:19:58 PM	Bypass valve closed
5/14/2011	4:19:58 PM	Bubbler valve closed
5/14/2011	4:19:58 PM	Helium valve opened
5/14/2011	4:19:58 PM	Helium MFC set to  500.000000
5/14/2011	4:19:58 PM	H2 MFC set to  0.000000
5/14/2011	4:19:58 PM	BCl3 MFC set to  0.000000
5/14/2011	4:19:58 PM	PHl3 MFC set to  0.000000
5/14/2011	4:19:58 PM	SiCl4 MFC set to  0.000000
5/14/2011	4:19:58 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	4:19:58 PM	Tube furnace set to 0
5/14/2011	4:20:02 PM	Run aborted at 4:20 PM
5/14/2011	4:20:02 PM	Helium valve closed
5/14/2011	4:20:02 PM	H2 valve closed
5/14/2011	4:20:02 PM	BCl3 valve closed
5/14/2011	4:20:02 PM	PH3 valve closed
5/14/2011	4:20:02 PM	SiCl4 pre valve closed
5/14/2011	4:20:02 PM	SiCl4 post valve closed
5/14/2011	4:20:02 PM	Bypass valve closed
5/14/2011	4:20:02 PM	Main Vac valve closed
5/14/2011	4:20:02 PM	Bubbler valve closed
5/14/2011	4:20:02 PM	Helium MFC set to  0.000000
5/14/2011	4:20:02 PM	H2 MFC set to  0.000000
5/14/2011	4:20:02 PM	BCl3 MFC set to  0.000000
5/14/2011	4:20:02 PM	PHl3 MFC set to  0.000000
5/14/2011	4:20:02 PM	SiCl4 MFC set to  0.000000
5/14/2011	4:20:02 PM	Tube furnace set to 0
5/14/2011	4:20:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2011	4:20:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2011	4:20:03 PM	Recipe started at 4:20 PM
5/14/2011	4:20:03 PM	Helium valve closed
5/14/2011	4:20:03 PM	H2 valve closed
5/14/2011	4:20:03 PM	BCl3 valve closed
5/14/2011	4:20:03 PM	PH3 valve closed
5/14/2011	4:20:03 PM	SiCl4 pre valve closed
5/14/2011	4:20:03 PM	SiCl4 post valve closed
5/14/2011	4:20:03 PM	Main Vac valve closed
5/14/2011	4:20:03 PM	Bubbler valve closed
5/14/2011	4:20:03 PM	Bypass valve opened
5/14/2011	4:20:03 PM	Helium MFC set to  0.000000
5/14/2011	4:20:03 PM	H2 MFC set to  0.000000
5/14/2011	4:20:03 PM	BCl3 MFC set to  0.000000
5/14/2011	4:20:03 PM	PHl3 MFC set to  0.000000
5/14/2011	4:20:03 PM	SiCl4 MFC set to  0.000000
5/14/2011	4:20:03 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	4:20:03 PM	Tube furnace set to 0
5/14/2011	4:20:04 PM	Helium valve closed
5/14/2011	4:20:04 PM	H2 valve closed
5/14/2011	4:20:04 PM	BCl3 valve closed
5/14/2011	4:20:04 PM	PH3 valve closed
5/14/2011	4:20:04 PM	SiCl4 pre valve closed
5/14/2011	4:20:04 PM	SiCl4 post valve closed
5/14/2011	4:20:04 PM	Bubbler valve closed
5/14/2011	4:20:04 PM	Main Vac valve opened
5/14/2011	4:20:04 PM	Bypass valve opened
5/14/2011	4:20:04 PM	Helium MFC set to  0.000000
5/14/2011	4:20:04 PM	H2 MFC set to  0.000000
5/14/2011	4:20:04 PM	BCl3 MFC set to  0.000000
5/14/2011	4:20:04 PM	PHl3 MFC set to  0.000000
5/14/2011	4:20:04 PM	SiCl4 MFC set to  0.000000
5/14/2011	4:20:04 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	4:20:04 PM	Tube furnace set to 0
5/14/2011	4:20:04 PM	Run finished at 4:20 PM
5/14/2011	4:20:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2011	4:20:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/14/2011	4:20:13 PM	Recipe started at 4:20 PM
5/14/2011	4:20:13 PM	Helium valve closed
5/14/2011	4:20:13 PM	H2 valve closed
5/14/2011	4:20:13 PM	BCl3 valve closed
5/14/2011	4:20:13 PM	PH3 valve closed
5/14/2011	4:20:13 PM	SiCl4 pre valve closed
5/14/2011	4:20:13 PM	SiCl4 post valve closed
5/14/2011	4:20:13 PM	Main Vac valve closed
5/14/2011	4:20:13 PM	Bypass valve closed
5/14/2011	4:20:13 PM	Bubbler valve closed
5/14/2011	4:20:13 PM	Helium MFC set to  0.000000
5/14/2011	4:20:13 PM	H2 MFC set to  0.000000
5/14/2011	4:20:13 PM	BCl3 MFC set to  0.000000
5/14/2011	4:20:13 PM	PHl3 MFC set to  0.000000
5/14/2011	4:20:13 PM	SiCl4 MFC set to  0.000000
5/14/2011	4:20:13 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	4:20:14 PM	Tube furnace set to 0
5/14/2011	4:20:14 PM	Run finished at 4:20 PM
5/14/2011	4:20:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/14/2011	4:32:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2011	4:32:23 PM	Recipe started at 4:32 PM
5/14/2011	4:32:23 PM	H2 valve closed
5/14/2011	4:32:23 PM	BCl3 valve closed
5/14/2011	4:32:23 PM	PH3 valve closed
5/14/2011	4:32:23 PM	SiCl4 pre valve closed
5/14/2011	4:32:23 PM	SiCl4 post valve closed
5/14/2011	4:32:23 PM	Main Vac valve closed
5/14/2011	4:32:23 PM	Bypass valve closed
5/14/2011	4:32:23 PM	Bubbler valve closed
5/14/2011	4:32:23 PM	Helium valve opened
5/14/2011	4:32:23 PM	Helium MFC set to  500.000000
5/14/2011	4:32:23 PM	H2 MFC set to  0.000000
5/14/2011	4:32:23 PM	BCl3 MFC set to  0.000000
5/14/2011	4:32:23 PM	PHl3 MFC set to  0.000000
5/14/2011	4:32:23 PM	SiCl4 MFC set to  0.000000
5/14/2011	4:32:23 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	4:32:24 PM	Tube furnace set to 0
5/14/2011	4:33:43 PM	Helium valve closed
5/14/2011	4:33:43 PM	H2 valve closed
5/14/2011	4:33:43 PM	BCl3 valve closed
5/14/2011	4:33:43 PM	PH3 valve closed
5/14/2011	4:33:43 PM	SiCl4 pre valve closed
5/14/2011	4:33:43 PM	SiCl4 post valve closed
5/14/2011	4:33:43 PM	Main Vac valve closed
5/14/2011	4:33:43 PM	Bypass valve closed
5/14/2011	4:33:43 PM	Bubbler valve closed
5/14/2011	4:33:43 PM	Helium MFC set to  0.000000
5/14/2011	4:33:43 PM	H2 MFC set to  0.000000
5/14/2011	4:33:43 PM	BCl3 MFC set to  0.000000
5/14/2011	4:33:43 PM	PHl3 MFC set to  0.000000
5/14/2011	4:33:43 PM	SiCl4 MFC set to  0.000000
5/14/2011	4:33:43 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	4:33:43 PM	Tube furnace set to 0
5/14/2011	4:33:44 PM	Run finished at 4:33 PM
5/14/2011	4:33:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2011	5:09:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2011	5:09:12 PM	Recipe started at 5:09 PM
5/14/2011	5:09:12 PM	Helium valve closed
5/14/2011	5:09:12 PM	H2 valve closed
5/14/2011	5:09:12 PM	BCl3 valve closed
5/14/2011	5:09:12 PM	PH3 valve closed
5/14/2011	5:09:12 PM	SiCl4 pre valve closed
5/14/2011	5:09:12 PM	SiCl4 post valve closed
5/14/2011	5:09:12 PM	Main Vac valve closed
5/14/2011	5:09:12 PM	Bubbler valve closed
5/14/2011	5:09:12 PM	Bypass valve opened
5/14/2011	5:09:12 PM	Helium MFC set to  0.000000
5/14/2011	5:09:12 PM	H2 MFC set to  0.000000
5/14/2011	5:09:12 PM	BCl3 MFC set to  0.000000
5/14/2011	5:09:12 PM	PHl3 MFC set to  0.000000
5/14/2011	5:09:12 PM	SiCl4 MFC set to  0.000000
5/14/2011	5:09:12 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	5:09:13 PM	Tube furnace set to 0
5/14/2011	5:09:46 PM	Helium valve closed
5/14/2011	5:09:46 PM	H2 valve closed
5/14/2011	5:09:46 PM	BCl3 valve closed
5/14/2011	5:09:46 PM	PH3 valve closed
5/14/2011	5:09:46 PM	SiCl4 pre valve closed
5/14/2011	5:09:46 PM	SiCl4 post valve closed
5/14/2011	5:09:46 PM	Bubbler valve closed
5/14/2011	5:09:46 PM	Main Vac valve opened
5/14/2011	5:09:46 PM	Bypass valve opened
5/14/2011	5:09:46 PM	Helium MFC set to  0.000000
5/14/2011	5:09:46 PM	H2 MFC set to  0.000000
5/14/2011	5:09:46 PM	BCl3 MFC set to  0.000000
5/14/2011	5:09:46 PM	PHl3 MFC set to  0.000000
5/14/2011	5:09:46 PM	SiCl4 MFC set to  0.000000
5/14/2011	5:09:46 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	5:09:46 PM	Tube furnace set to 0
5/14/2011	5:09:46 PM	Run finished at 5:09 PM
5/14/2011	5:09:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2011	6:47:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/14/2011	6:47:32 PM	Recipe started at 6:47 PM
5/14/2011	6:47:32 PM	Helium valve closed
5/14/2011	6:47:32 PM	H2 valve closed
5/14/2011	6:47:32 PM	BCl3 valve closed
5/14/2011	6:47:32 PM	PH3 valve closed
5/14/2011	6:47:32 PM	SiCl4 pre valve closed
5/14/2011	6:47:32 PM	SiCl4 post valve closed
5/14/2011	6:47:32 PM	Main Vac valve closed
5/14/2011	6:47:32 PM	Bubbler valve closed
5/14/2011	6:47:32 PM	Bypass valve opened
5/14/2011	6:47:32 PM	Helium MFC set to  0.000000
5/14/2011	6:47:32 PM	H2 MFC set to  0.000000
5/14/2011	6:47:32 PM	BCl3 MFC set to  0.000000
5/14/2011	6:47:32 PM	PHl3 MFC set to  0.000000
5/14/2011	6:47:32 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:47:32 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:47:32 PM	Tube furnace set to 0
5/14/2011	6:47:32 PM	Helium valve closed
5/14/2011	6:47:32 PM	H2 valve closed
5/14/2011	6:47:32 PM	BCl3 valve closed
5/14/2011	6:47:32 PM	PH3 valve closed
5/14/2011	6:47:32 PM	SiCl4 pre valve closed
5/14/2011	6:47:32 PM	SiCl4 post valve closed
5/14/2011	6:47:32 PM	Bubbler valve closed
5/14/2011	6:47:32 PM	Main Vac valve opened
5/14/2011	6:47:32 PM	Bypass valve opened
5/14/2011	6:47:32 PM	Helium MFC set to  0.000000
5/14/2011	6:47:32 PM	H2 MFC set to  0.000000
5/14/2011	6:47:32 PM	BCl3 MFC set to  0.000000
5/14/2011	6:47:32 PM	PHl3 MFC set to  0.000000
5/14/2011	6:47:32 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:47:32 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:47:32 PM	Tube furnace set to 0
5/14/2011	6:48:32 PM	H2 valve closed
5/14/2011	6:48:32 PM	BCl3 valve closed
5/14/2011	6:48:32 PM	PH3 valve closed
5/14/2011	6:48:32 PM	SiCl4 pre valve closed
5/14/2011	6:48:32 PM	SiCl4 post valve closed
5/14/2011	6:48:32 PM	Bubbler valve closed
5/14/2011	6:48:32 PM	Helium valve opened
5/14/2011	6:48:32 PM	Main Vac valve opened
5/14/2011	6:48:32 PM	Bypass valve opened
5/14/2011	6:48:32 PM	Helium MFC set to  100.000000
5/14/2011	6:48:32 PM	H2 MFC set to  0.000000
5/14/2011	6:48:32 PM	BCl3 MFC set to  0.000000
5/14/2011	6:48:32 PM	PHl3 MFC set to  0.000000
5/14/2011	6:48:32 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:48:32 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:48:32 PM	Tube furnace set to 0
5/14/2011	6:49:32 PM	Helium valve closed
5/14/2011	6:49:32 PM	H2 valve closed
5/14/2011	6:49:32 PM	BCl3 valve closed
5/14/2011	6:49:32 PM	PH3 valve closed
5/14/2011	6:49:32 PM	SiCl4 pre valve closed
5/14/2011	6:49:32 PM	SiCl4 post valve closed
5/14/2011	6:49:32 PM	Bubbler valve closed
5/14/2011	6:49:33 PM	Main Vac valve opened
5/14/2011	6:49:33 PM	Bypass valve opened
5/14/2011	6:49:33 PM	Helium MFC set to  0.000000
5/14/2011	6:49:33 PM	H2 MFC set to  0.000000
5/14/2011	6:49:33 PM	BCl3 MFC set to  0.000000
5/14/2011	6:49:33 PM	PHl3 MFC set to  0.000000
5/14/2011	6:49:33 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:49:33 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:49:33 PM	Tube furnace set to 0
5/14/2011	6:50:33 PM	H2 valve closed
5/14/2011	6:50:33 PM	BCl3 valve closed
5/14/2011	6:50:33 PM	PH3 valve closed
5/14/2011	6:50:33 PM	SiCl4 pre valve closed
5/14/2011	6:50:33 PM	SiCl4 post valve closed
5/14/2011	6:50:33 PM	Bubbler valve closed
5/14/2011	6:50:33 PM	Helium valve opened
5/14/2011	6:50:33 PM	Main Vac valve opened
5/14/2011	6:50:33 PM	Bypass valve opened
5/14/2011	6:50:33 PM	Helium MFC set to  100.000000
5/14/2011	6:50:33 PM	H2 MFC set to  0.000000
5/14/2011	6:50:33 PM	BCl3 MFC set to  0.000000
5/14/2011	6:50:33 PM	PHl3 MFC set to  0.000000
5/14/2011	6:50:33 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:50:33 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:50:33 PM	Tube furnace set to 0
5/14/2011	6:51:33 PM	Helium valve closed
5/14/2011	6:51:33 PM	H2 valve closed
5/14/2011	6:51:33 PM	BCl3 valve closed
5/14/2011	6:51:33 PM	PH3 valve closed
5/14/2011	6:51:33 PM	SiCl4 pre valve closed
5/14/2011	6:51:33 PM	SiCl4 post valve closed
5/14/2011	6:51:33 PM	Bubbler valve closed
5/14/2011	6:51:33 PM	Main Vac valve opened
5/14/2011	6:51:33 PM	Bypass valve opened
5/14/2011	6:51:33 PM	Helium MFC set to  0.000000
5/14/2011	6:51:33 PM	H2 MFC set to  0.000000
5/14/2011	6:51:33 PM	BCl3 MFC set to  0.000000
5/14/2011	6:51:33 PM	PHl3 MFC set to  0.000000
5/14/2011	6:51:33 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:51:33 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:51:33 PM	Tube furnace set to 0
5/14/2011	6:52:33 PM	H2 valve closed
5/14/2011	6:52:33 PM	BCl3 valve closed
5/14/2011	6:52:33 PM	PH3 valve closed
5/14/2011	6:52:33 PM	SiCl4 pre valve closed
5/14/2011	6:52:33 PM	SiCl4 post valve closed
5/14/2011	6:52:33 PM	Bubbler valve closed
5/14/2011	6:52:33 PM	Helium valve opened
5/14/2011	6:52:33 PM	Main Vac valve opened
5/14/2011	6:52:33 PM	Bypass valve opened
5/14/2011	6:52:33 PM	Helium MFC set to  100.000000
5/14/2011	6:52:33 PM	H2 MFC set to  0.000000
5/14/2011	6:52:33 PM	BCl3 MFC set to  0.000000
5/14/2011	6:52:33 PM	PHl3 MFC set to  0.000000
5/14/2011	6:52:33 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:52:33 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:52:33 PM	Tube furnace set to 0
5/14/2011	6:53:33 PM	Helium valve closed
5/14/2011	6:53:33 PM	H2 valve closed
5/14/2011	6:53:33 PM	BCl3 valve closed
5/14/2011	6:53:33 PM	PH3 valve closed
5/14/2011	6:53:33 PM	SiCl4 pre valve closed
5/14/2011	6:53:33 PM	SiCl4 post valve closed
5/14/2011	6:53:33 PM	Bubbler valve closed
5/14/2011	6:53:33 PM	Main Vac valve opened
5/14/2011	6:53:33 PM	Bypass valve opened
5/14/2011	6:53:33 PM	Helium MFC set to  0.000000
5/14/2011	6:53:33 PM	H2 MFC set to  0.000000
5/14/2011	6:53:33 PM	BCl3 MFC set to  0.000000
5/14/2011	6:53:33 PM	PHl3 MFC set to  0.000000
5/14/2011	6:53:33 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:53:33 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:53:33 PM	Tube furnace set to 0
5/14/2011	6:54:33 PM	H2 valve closed
5/14/2011	6:54:34 PM	BCl3 valve closed
5/14/2011	6:54:34 PM	PH3 valve closed
5/14/2011	6:54:34 PM	SiCl4 pre valve closed
5/14/2011	6:54:34 PM	SiCl4 post valve closed
5/14/2011	6:54:34 PM	Bubbler valve closed
5/14/2011	6:54:34 PM	Helium valve opened
5/14/2011	6:54:34 PM	Main Vac valve opened
5/14/2011	6:54:34 PM	Bypass valve opened
5/14/2011	6:54:34 PM	Helium MFC set to  100.000000
5/14/2011	6:54:34 PM	H2 MFC set to  0.000000
5/14/2011	6:54:34 PM	BCl3 MFC set to  0.000000
5/14/2011	6:54:34 PM	PHl3 MFC set to  0.000000
5/14/2011	6:54:34 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:54:34 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:54:34 PM	Tube furnace set to 0
5/14/2011	6:55:34 PM	Helium valve closed
5/14/2011	6:55:34 PM	H2 valve closed
5/14/2011	6:55:34 PM	BCl3 valve closed
5/14/2011	6:55:34 PM	PH3 valve closed
5/14/2011	6:55:34 PM	SiCl4 pre valve closed
5/14/2011	6:55:34 PM	SiCl4 post valve closed
5/14/2011	6:55:34 PM	Bubbler valve closed
5/14/2011	6:55:34 PM	Main Vac valve opened
5/14/2011	6:55:34 PM	Bypass valve opened
5/14/2011	6:55:34 PM	Helium MFC set to  0.000000
5/14/2011	6:55:34 PM	H2 MFC set to  0.000000
5/14/2011	6:55:34 PM	BCl3 MFC set to  0.000000
5/14/2011	6:55:34 PM	PHl3 MFC set to  0.000000
5/14/2011	6:55:34 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:55:34 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:55:34 PM	Tube furnace set to 0
5/14/2011	6:56:34 PM	H2 valve closed
5/14/2011	6:56:34 PM	BCl3 valve closed
5/14/2011	6:56:34 PM	PH3 valve closed
5/14/2011	6:56:34 PM	SiCl4 pre valve closed
5/14/2011	6:56:34 PM	SiCl4 post valve closed
5/14/2011	6:56:34 PM	Bubbler valve closed
5/14/2011	6:56:34 PM	Helium valve opened
5/14/2011	6:56:34 PM	Main Vac valve opened
5/14/2011	6:56:34 PM	Bypass valve opened
5/14/2011	6:56:34 PM	Helium MFC set to  100.000000
5/14/2011	6:56:34 PM	H2 MFC set to  0.000000
5/14/2011	6:56:34 PM	BCl3 MFC set to  0.000000
5/14/2011	6:56:34 PM	PHl3 MFC set to  0.000000
5/14/2011	6:56:34 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:56:34 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:56:34 PM	Tube furnace set to 0
5/14/2011	6:57:34 PM	Helium valve closed
5/14/2011	6:57:34 PM	H2 valve closed
5/14/2011	6:57:34 PM	BCl3 valve closed
5/14/2011	6:57:34 PM	PH3 valve closed
5/14/2011	6:57:34 PM	SiCl4 pre valve closed
5/14/2011	6:57:34 PM	SiCl4 post valve closed
5/14/2011	6:57:34 PM	Bubbler valve closed
5/14/2011	6:57:34 PM	Main Vac valve opened
5/14/2011	6:57:34 PM	Bypass valve opened
5/14/2011	6:57:34 PM	Helium MFC set to  0.000000
5/14/2011	6:57:34 PM	H2 MFC set to  0.000000
5/14/2011	6:57:34 PM	BCl3 MFC set to  0.000000
5/14/2011	6:57:34 PM	PHl3 MFC set to  0.000000
5/14/2011	6:57:34 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:57:34 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:57:34 PM	Tube furnace set to 0
5/14/2011	6:58:34 PM	H2 valve closed
5/14/2011	6:58:34 PM	BCl3 valve closed
5/14/2011	6:58:34 PM	PH3 valve closed
5/14/2011	6:58:34 PM	SiCl4 pre valve closed
5/14/2011	6:58:34 PM	SiCl4 post valve closed
5/14/2011	6:58:34 PM	Bubbler valve closed
5/14/2011	6:58:34 PM	Helium valve opened
5/14/2011	6:58:34 PM	Main Vac valve opened
5/14/2011	6:58:34 PM	Bypass valve opened
5/14/2011	6:58:34 PM	Helium MFC set to  100.000000
5/14/2011	6:58:34 PM	H2 MFC set to  0.000000
5/14/2011	6:58:34 PM	BCl3 MFC set to  0.000000
5/14/2011	6:58:34 PM	PHl3 MFC set to  0.000000
5/14/2011	6:58:34 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:58:34 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:58:35 PM	Tube furnace set to 0
5/14/2011	6:59:35 PM	Helium valve closed
5/14/2011	6:59:35 PM	H2 valve closed
5/14/2011	6:59:35 PM	BCl3 valve closed
5/14/2011	6:59:35 PM	PH3 valve closed
5/14/2011	6:59:35 PM	SiCl4 pre valve closed
5/14/2011	6:59:35 PM	SiCl4 post valve closed
5/14/2011	6:59:35 PM	Bubbler valve closed
5/14/2011	6:59:35 PM	Main Vac valve opened
5/14/2011	6:59:35 PM	Bypass valve opened
5/14/2011	6:59:35 PM	Helium MFC set to  0.000000
5/14/2011	6:59:35 PM	H2 MFC set to  0.000000
5/14/2011	6:59:35 PM	BCl3 MFC set to  0.000000
5/14/2011	6:59:35 PM	PHl3 MFC set to  0.000000
5/14/2011	6:59:35 PM	SiCl4 MFC set to  0.000000
5/14/2011	6:59:35 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	6:59:35 PM	Tube furnace set to 0
5/14/2011	7:00:35 PM	H2 valve closed
5/14/2011	7:00:35 PM	BCl3 valve closed
5/14/2011	7:00:35 PM	PH3 valve closed
5/14/2011	7:00:35 PM	SiCl4 pre valve closed
5/14/2011	7:00:35 PM	SiCl4 post valve closed
5/14/2011	7:00:35 PM	Bubbler valve closed
5/14/2011	7:00:35 PM	Helium valve opened
5/14/2011	7:00:35 PM	Main Vac valve opened
5/14/2011	7:00:35 PM	Bypass valve opened
5/14/2011	7:00:35 PM	Helium MFC set to  100.000000
5/14/2011	7:00:35 PM	H2 MFC set to  0.000000
5/14/2011	7:00:35 PM	BCl3 MFC set to  0.000000
5/14/2011	7:00:35 PM	PHl3 MFC set to  0.000000
5/14/2011	7:00:35 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:00:35 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:00:35 PM	Tube furnace set to 0
5/14/2011	7:01:35 PM	Helium valve closed
5/14/2011	7:01:35 PM	H2 valve closed
5/14/2011	7:01:35 PM	BCl3 valve closed
5/14/2011	7:01:35 PM	PH3 valve closed
5/14/2011	7:01:35 PM	SiCl4 pre valve closed
5/14/2011	7:01:35 PM	SiCl4 post valve closed
5/14/2011	7:01:35 PM	Bubbler valve closed
5/14/2011	7:01:35 PM	Main Vac valve opened
5/14/2011	7:01:35 PM	Bypass valve opened
5/14/2011	7:01:35 PM	Helium MFC set to  0.000000
5/14/2011	7:01:35 PM	H2 MFC set to  0.000000
5/14/2011	7:01:35 PM	BCl3 MFC set to  0.000000
5/14/2011	7:01:35 PM	PHl3 MFC set to  0.000000
5/14/2011	7:01:35 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:01:35 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:01:35 PM	Tube furnace set to 0
5/14/2011	7:02:35 PM	H2 valve closed
5/14/2011	7:02:35 PM	BCl3 valve closed
5/14/2011	7:02:35 PM	PH3 valve closed
5/14/2011	7:02:35 PM	SiCl4 pre valve closed
5/14/2011	7:02:35 PM	SiCl4 post valve closed
5/14/2011	7:02:35 PM	Bubbler valve closed
5/14/2011	7:02:35 PM	Helium valve opened
5/14/2011	7:02:35 PM	Main Vac valve opened
5/14/2011	7:02:35 PM	Bypass valve opened
5/14/2011	7:02:35 PM	Helium MFC set to  100.000000
5/14/2011	7:02:35 PM	H2 MFC set to  0.000000
5/14/2011	7:02:35 PM	BCl3 MFC set to  0.000000
5/14/2011	7:02:35 PM	PHl3 MFC set to  0.000000
5/14/2011	7:02:35 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:02:35 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:02:35 PM	Tube furnace set to 0
5/14/2011	7:03:35 PM	Helium valve closed
5/14/2011	7:03:35 PM	H2 valve closed
5/14/2011	7:03:35 PM	BCl3 valve closed
5/14/2011	7:03:35 PM	PH3 valve closed
5/14/2011	7:03:35 PM	SiCl4 pre valve closed
5/14/2011	7:03:35 PM	SiCl4 post valve closed
5/14/2011	7:03:35 PM	Bubbler valve closed
5/14/2011	7:03:35 PM	Main Vac valve opened
5/14/2011	7:03:35 PM	Bypass valve opened
5/14/2011	7:03:35 PM	Helium MFC set to  0.000000
5/14/2011	7:03:35 PM	H2 MFC set to  0.000000
5/14/2011	7:03:35 PM	BCl3 MFC set to  0.000000
5/14/2011	7:03:35 PM	PHl3 MFC set to  0.000000
5/14/2011	7:03:35 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:03:35 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:03:36 PM	Tube furnace set to 0
5/14/2011	7:04:36 PM	H2 valve closed
5/14/2011	7:04:36 PM	BCl3 valve closed
5/14/2011	7:04:36 PM	PH3 valve closed
5/14/2011	7:04:36 PM	SiCl4 pre valve closed
5/14/2011	7:04:36 PM	SiCl4 post valve closed
5/14/2011	7:04:36 PM	Bubbler valve closed
5/14/2011	7:04:36 PM	Helium valve opened
5/14/2011	7:04:36 PM	Main Vac valve opened
5/14/2011	7:04:36 PM	Bypass valve opened
5/14/2011	7:04:36 PM	Helium MFC set to  100.000000
5/14/2011	7:04:36 PM	H2 MFC set to  0.000000
5/14/2011	7:04:36 PM	BCl3 MFC set to  0.000000
5/14/2011	7:04:36 PM	PHl3 MFC set to  0.000000
5/14/2011	7:04:36 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:04:36 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:04:36 PM	Tube furnace set to 0
5/14/2011	7:05:36 PM	Helium valve closed
5/14/2011	7:05:36 PM	H2 valve closed
5/14/2011	7:05:36 PM	BCl3 valve closed
5/14/2011	7:05:36 PM	PH3 valve closed
5/14/2011	7:05:36 PM	SiCl4 pre valve closed
5/14/2011	7:05:36 PM	SiCl4 post valve closed
5/14/2011	7:05:36 PM	Bubbler valve closed
5/14/2011	7:05:36 PM	Main Vac valve opened
5/14/2011	7:05:36 PM	Bypass valve opened
5/14/2011	7:05:36 PM	Helium MFC set to  0.000000
5/14/2011	7:05:36 PM	H2 MFC set to  0.000000
5/14/2011	7:05:36 PM	BCl3 MFC set to  0.000000
5/14/2011	7:05:36 PM	PHl3 MFC set to  0.000000
5/14/2011	7:05:36 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:05:36 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:05:36 PM	Tube furnace set to 0
5/14/2011	7:06:36 PM	H2 valve closed
5/14/2011	7:06:36 PM	BCl3 valve closed
5/14/2011	7:06:36 PM	PH3 valve closed
5/14/2011	7:06:36 PM	SiCl4 pre valve closed
5/14/2011	7:06:36 PM	SiCl4 post valve closed
5/14/2011	7:06:36 PM	Bubbler valve closed
5/14/2011	7:06:36 PM	Helium valve opened
5/14/2011	7:06:36 PM	Main Vac valve opened
5/14/2011	7:06:36 PM	Bypass valve opened
5/14/2011	7:06:36 PM	Helium MFC set to  100.000000
5/14/2011	7:06:36 PM	H2 MFC set to  0.000000
5/14/2011	7:06:36 PM	BCl3 MFC set to  0.000000
5/14/2011	7:06:36 PM	PHl3 MFC set to  0.000000
5/14/2011	7:06:36 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:06:36 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:06:36 PM	Tube furnace set to 0
5/14/2011	7:07:36 PM	Helium valve closed
5/14/2011	7:07:36 PM	H2 valve closed
5/14/2011	7:07:36 PM	BCl3 valve closed
5/14/2011	7:07:36 PM	PH3 valve closed
5/14/2011	7:07:36 PM	SiCl4 pre valve closed
5/14/2011	7:07:36 PM	SiCl4 post valve closed
5/14/2011	7:07:36 PM	Bubbler valve closed
5/14/2011	7:07:36 PM	Main Vac valve opened
5/14/2011	7:07:36 PM	Bypass valve opened
5/14/2011	7:07:36 PM	Helium MFC set to  0.000000
5/14/2011	7:07:36 PM	H2 MFC set to  0.000000
5/14/2011	7:07:36 PM	BCl3 MFC set to  0.000000
5/14/2011	7:07:36 PM	PHl3 MFC set to  0.000000
5/14/2011	7:07:36 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:07:36 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:07:36 PM	Tube furnace set to 0
5/14/2011	7:07:37 PM	Run finished at 7:07 PM
5/14/2011	7:07:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/14/2011	7:18:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/14/2011	7:19:05 PM	Recipe started at 7:18 PM
5/14/2011	7:19:05 PM	Helium valve closed
5/14/2011	7:19:05 PM	H2 valve closed
5/14/2011	7:19:05 PM	BCl3 valve closed
5/14/2011	7:19:05 PM	PH3 valve closed
5/14/2011	7:19:05 PM	SiCl4 pre valve closed
5/14/2011	7:19:05 PM	SiCl4 post valve closed
5/14/2011	7:19:05 PM	Main Vac valve closed
5/14/2011	7:19:05 PM	Bubbler valve closed
5/14/2011	7:19:05 PM	Bypass valve opened
5/14/2011	7:19:05 PM	Helium MFC set to  0.000000
5/14/2011	7:19:05 PM	H2 MFC set to  0.000000
5/14/2011	7:19:05 PM	BCl3 MFC set to  0.000000
5/14/2011	7:19:05 PM	PHl3 MFC set to  0.000000
5/14/2011	7:19:05 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:19:05 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:19:05 PM	Tube furnace set to 0
5/14/2011	7:19:06 PM	Helium valve closed
5/14/2011	7:19:06 PM	H2 valve closed
5/14/2011	7:19:06 PM	BCl3 valve closed
5/14/2011	7:19:06 PM	PH3 valve closed
5/14/2011	7:19:06 PM	SiCl4 pre valve closed
5/14/2011	7:19:06 PM	SiCl4 post valve closed
5/14/2011	7:19:06 PM	Bubbler valve closed
5/14/2011	7:19:06 PM	Main Vac valve opened
5/14/2011	7:19:06 PM	Bypass valve opened
5/14/2011	7:19:06 PM	Helium MFC set to  0.000000
5/14/2011	7:19:06 PM	H2 MFC set to  0.000000
5/14/2011	7:19:06 PM	BCl3 MFC set to  0.000000
5/14/2011	7:19:06 PM	PHl3 MFC set to  0.000000
5/14/2011	7:19:06 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:19:06 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:19:06 PM	Tube furnace set to 0
5/14/2011	7:20:06 PM	H2 valve closed
5/14/2011	7:20:06 PM	BCl3 valve closed
5/14/2011	7:20:06 PM	PH3 valve closed
5/14/2011	7:20:06 PM	SiCl4 pre valve closed
5/14/2011	7:20:06 PM	SiCl4 post valve closed
5/14/2011	7:20:06 PM	Bubbler valve closed
5/14/2011	7:20:06 PM	Helium valve opened
5/14/2011	7:20:06 PM	Main Vac valve opened
5/14/2011	7:20:06 PM	Bypass valve opened
5/14/2011	7:20:06 PM	Helium MFC set to  100.000000
5/14/2011	7:20:06 PM	H2 MFC set to  0.000000
5/14/2011	7:20:06 PM	BCl3 MFC set to  0.000000
5/14/2011	7:20:06 PM	PHl3 MFC set to  0.000000
5/14/2011	7:20:06 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:20:06 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:20:06 PM	Tube furnace set to 0
5/14/2011	7:21:06 PM	Helium valve closed
5/14/2011	7:21:06 PM	H2 valve closed
5/14/2011	7:21:06 PM	BCl3 valve closed
5/14/2011	7:21:06 PM	PH3 valve closed
5/14/2011	7:21:06 PM	SiCl4 pre valve closed
5/14/2011	7:21:06 PM	SiCl4 post valve closed
5/14/2011	7:21:06 PM	Bubbler valve closed
5/14/2011	7:21:06 PM	Main Vac valve opened
5/14/2011	7:21:06 PM	Bypass valve opened
5/14/2011	7:21:06 PM	Helium MFC set to  0.000000
5/14/2011	7:21:06 PM	H2 MFC set to  0.000000
5/14/2011	7:21:06 PM	BCl3 MFC set to  0.000000
5/14/2011	7:21:06 PM	PHl3 MFC set to  0.000000
5/14/2011	7:21:06 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:21:06 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:21:06 PM	Tube furnace set to 0
5/14/2011	7:22:06 PM	H2 valve closed
5/14/2011	7:22:06 PM	BCl3 valve closed
5/14/2011	7:22:06 PM	PH3 valve closed
5/14/2011	7:22:06 PM	SiCl4 pre valve closed
5/14/2011	7:22:06 PM	SiCl4 post valve closed
5/14/2011	7:22:06 PM	Bubbler valve closed
5/14/2011	7:22:06 PM	Helium valve opened
5/14/2011	7:22:06 PM	Main Vac valve opened
5/14/2011	7:22:06 PM	Bypass valve opened
5/14/2011	7:22:06 PM	Helium MFC set to  100.000000
5/14/2011	7:22:06 PM	H2 MFC set to  0.000000
5/14/2011	7:22:06 PM	BCl3 MFC set to  0.000000
5/14/2011	7:22:06 PM	PHl3 MFC set to  0.000000
5/14/2011	7:22:06 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:22:06 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:22:06 PM	Tube furnace set to 0
5/14/2011	7:23:06 PM	Helium valve closed
5/14/2011	7:23:06 PM	H2 valve closed
5/14/2011	7:23:06 PM	BCl3 valve closed
5/14/2011	7:23:06 PM	PH3 valve closed
5/14/2011	7:23:06 PM	SiCl4 pre valve closed
5/14/2011	7:23:06 PM	SiCl4 post valve closed
5/14/2011	7:23:06 PM	Bubbler valve closed
5/14/2011	7:23:06 PM	Main Vac valve opened
5/14/2011	7:23:06 PM	Bypass valve opened
5/14/2011	7:23:06 PM	Helium MFC set to  0.000000
5/14/2011	7:23:06 PM	H2 MFC set to  0.000000
5/14/2011	7:23:06 PM	BCl3 MFC set to  0.000000
5/14/2011	7:23:06 PM	PHl3 MFC set to  0.000000
5/14/2011	7:23:06 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:23:06 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:23:07 PM	Tube furnace set to 0
5/14/2011	7:24:07 PM	H2 valve closed
5/14/2011	7:24:07 PM	BCl3 valve closed
5/14/2011	7:24:07 PM	PH3 valve closed
5/14/2011	7:24:07 PM	SiCl4 pre valve closed
5/14/2011	7:24:07 PM	SiCl4 post valve closed
5/14/2011	7:24:07 PM	Bubbler valve closed
5/14/2011	7:24:07 PM	Helium valve opened
5/14/2011	7:24:07 PM	Main Vac valve opened
5/14/2011	7:24:07 PM	Bypass valve opened
5/14/2011	7:24:07 PM	Helium MFC set to  100.000000
5/14/2011	7:24:07 PM	H2 MFC set to  0.000000
5/14/2011	7:24:07 PM	BCl3 MFC set to  0.000000
5/14/2011	7:24:07 PM	PHl3 MFC set to  0.000000
5/14/2011	7:24:07 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:24:07 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:24:07 PM	Tube furnace set to 0
5/14/2011	7:25:07 PM	Helium valve closed
5/14/2011	7:25:07 PM	H2 valve closed
5/14/2011	7:25:07 PM	BCl3 valve closed
5/14/2011	7:25:07 PM	PH3 valve closed
5/14/2011	7:25:07 PM	SiCl4 pre valve closed
5/14/2011	7:25:07 PM	SiCl4 post valve closed
5/14/2011	7:25:07 PM	Bubbler valve closed
5/14/2011	7:25:07 PM	Main Vac valve opened
5/14/2011	7:25:07 PM	Bypass valve opened
5/14/2011	7:25:07 PM	Helium MFC set to  0.000000
5/14/2011	7:25:07 PM	H2 MFC set to  0.000000
5/14/2011	7:25:07 PM	BCl3 MFC set to  0.000000
5/14/2011	7:25:07 PM	PHl3 MFC set to  0.000000
5/14/2011	7:25:07 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:25:07 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:25:07 PM	Tube furnace set to 0
5/14/2011	7:26:07 PM	H2 valve closed
5/14/2011	7:26:07 PM	BCl3 valve closed
5/14/2011	7:26:07 PM	PH3 valve closed
5/14/2011	7:26:07 PM	SiCl4 pre valve closed
5/14/2011	7:26:07 PM	SiCl4 post valve closed
5/14/2011	7:26:07 PM	Bubbler valve closed
5/14/2011	7:26:07 PM	Helium valve opened
5/14/2011	7:26:07 PM	Main Vac valve opened
5/14/2011	7:26:07 PM	Bypass valve opened
5/14/2011	7:26:07 PM	Helium MFC set to  100.000000
5/14/2011	7:26:07 PM	H2 MFC set to  0.000000
5/14/2011	7:26:07 PM	BCl3 MFC set to  0.000000
5/14/2011	7:26:07 PM	PHl3 MFC set to  0.000000
5/14/2011	7:26:07 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:26:07 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:26:07 PM	Tube furnace set to 0
5/14/2011	7:27:07 PM	Helium valve closed
5/14/2011	7:27:07 PM	H2 valve closed
5/14/2011	7:27:07 PM	BCl3 valve closed
5/14/2011	7:27:07 PM	PH3 valve closed
5/14/2011	7:27:07 PM	SiCl4 pre valve closed
5/14/2011	7:27:07 PM	SiCl4 post valve closed
5/14/2011	7:27:07 PM	Bubbler valve closed
5/14/2011	7:27:07 PM	Main Vac valve opened
5/14/2011	7:27:07 PM	Bypass valve opened
5/14/2011	7:27:07 PM	Helium MFC set to  0.000000
5/14/2011	7:27:07 PM	H2 MFC set to  0.000000
5/14/2011	7:27:07 PM	BCl3 MFC set to  0.000000
5/14/2011	7:27:07 PM	PHl3 MFC set to  0.000000
5/14/2011	7:27:07 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:27:07 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:27:07 PM	Tube furnace set to 0
5/14/2011	7:28:07 PM	H2 valve closed
5/14/2011	7:28:07 PM	BCl3 valve closed
5/14/2011	7:28:07 PM	PH3 valve closed
5/14/2011	7:28:07 PM	SiCl4 pre valve closed
5/14/2011	7:28:07 PM	SiCl4 post valve closed
5/14/2011	7:28:07 PM	Bubbler valve closed
5/14/2011	7:28:07 PM	Helium valve opened
5/14/2011	7:28:07 PM	Main Vac valve opened
5/14/2011	7:28:07 PM	Bypass valve opened
5/14/2011	7:28:07 PM	Helium MFC set to  100.000000
5/14/2011	7:28:07 PM	H2 MFC set to  0.000000
5/14/2011	7:28:07 PM	BCl3 MFC set to  0.000000
5/14/2011	7:28:07 PM	PHl3 MFC set to  0.000000
5/14/2011	7:28:07 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:28:07 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:28:08 PM	Tube furnace set to 0
5/14/2011	7:29:08 PM	Helium valve closed
5/14/2011	7:29:08 PM	H2 valve closed
5/14/2011	7:29:08 PM	BCl3 valve closed
5/14/2011	7:29:08 PM	PH3 valve closed
5/14/2011	7:29:08 PM	SiCl4 pre valve closed
5/14/2011	7:29:08 PM	SiCl4 post valve closed
5/14/2011	7:29:08 PM	Bubbler valve closed
5/14/2011	7:29:08 PM	Main Vac valve opened
5/14/2011	7:29:08 PM	Bypass valve opened
5/14/2011	7:29:08 PM	Helium MFC set to  0.000000
5/14/2011	7:29:08 PM	H2 MFC set to  0.000000
5/14/2011	7:29:08 PM	BCl3 MFC set to  0.000000
5/14/2011	7:29:08 PM	PHl3 MFC set to  0.000000
5/14/2011	7:29:08 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:29:08 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:29:08 PM	Tube furnace set to 0
5/14/2011	7:30:08 PM	H2 valve closed
5/14/2011	7:30:08 PM	BCl3 valve closed
5/14/2011	7:30:08 PM	PH3 valve closed
5/14/2011	7:30:08 PM	SiCl4 pre valve closed
5/14/2011	7:30:08 PM	SiCl4 post valve closed
5/14/2011	7:30:08 PM	Bubbler valve closed
5/14/2011	7:30:08 PM	Helium valve opened
5/14/2011	7:30:08 PM	Main Vac valve opened
5/14/2011	7:30:08 PM	Bypass valve opened
5/14/2011	7:30:08 PM	Helium MFC set to  100.000000
5/14/2011	7:30:08 PM	H2 MFC set to  0.000000
5/14/2011	7:30:08 PM	BCl3 MFC set to  0.000000
5/14/2011	7:30:08 PM	PHl3 MFC set to  0.000000
5/14/2011	7:30:08 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:30:08 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:30:08 PM	Tube furnace set to 0
5/14/2011	7:31:08 PM	Helium valve closed
5/14/2011	7:31:08 PM	H2 valve closed
5/14/2011	7:31:08 PM	BCl3 valve closed
5/14/2011	7:31:08 PM	PH3 valve closed
5/14/2011	7:31:08 PM	SiCl4 pre valve closed
5/14/2011	7:31:08 PM	SiCl4 post valve closed
5/14/2011	7:31:08 PM	Bubbler valve closed
5/14/2011	7:31:08 PM	Main Vac valve opened
5/14/2011	7:31:08 PM	Bypass valve opened
5/14/2011	7:31:08 PM	Helium MFC set to  0.000000
5/14/2011	7:31:08 PM	H2 MFC set to  0.000000
5/14/2011	7:31:08 PM	BCl3 MFC set to  0.000000
5/14/2011	7:31:08 PM	PHl3 MFC set to  0.000000
5/14/2011	7:31:08 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:31:08 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:31:08 PM	Tube furnace set to 0
5/14/2011	7:32:08 PM	H2 valve closed
5/14/2011	7:32:08 PM	BCl3 valve closed
5/14/2011	7:32:08 PM	PH3 valve closed
5/14/2011	7:32:08 PM	SiCl4 pre valve closed
5/14/2011	7:32:08 PM	SiCl4 post valve closed
5/14/2011	7:32:08 PM	Bubbler valve closed
5/14/2011	7:32:08 PM	Helium valve opened
5/14/2011	7:32:08 PM	Main Vac valve opened
5/14/2011	7:32:08 PM	Bypass valve opened
5/14/2011	7:32:08 PM	Helium MFC set to  100.000000
5/14/2011	7:32:08 PM	H2 MFC set to  0.000000
5/14/2011	7:32:08 PM	BCl3 MFC set to  0.000000
5/14/2011	7:32:08 PM	PHl3 MFC set to  0.000000
5/14/2011	7:32:08 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:32:08 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:32:08 PM	Tube furnace set to 0
5/14/2011	7:33:08 PM	Helium valve closed
5/14/2011	7:33:08 PM	H2 valve closed
5/14/2011	7:33:08 PM	BCl3 valve closed
5/14/2011	7:33:08 PM	PH3 valve closed
5/14/2011	7:33:08 PM	SiCl4 pre valve closed
5/14/2011	7:33:08 PM	SiCl4 post valve closed
5/14/2011	7:33:08 PM	Bubbler valve closed
5/14/2011	7:33:08 PM	Main Vac valve opened
5/14/2011	7:33:08 PM	Bypass valve opened
5/14/2011	7:33:08 PM	Helium MFC set to  0.000000
5/14/2011	7:33:08 PM	H2 MFC set to  0.000000
5/14/2011	7:33:08 PM	BCl3 MFC set to  0.000000
5/14/2011	7:33:08 PM	PHl3 MFC set to  0.000000
5/14/2011	7:33:08 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:33:08 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:33:09 PM	Tube furnace set to 0
5/14/2011	7:34:09 PM	H2 valve closed
5/14/2011	7:34:09 PM	BCl3 valve closed
5/14/2011	7:34:09 PM	PH3 valve closed
5/14/2011	7:34:09 PM	SiCl4 pre valve closed
5/14/2011	7:34:09 PM	SiCl4 post valve closed
5/14/2011	7:34:09 PM	Bubbler valve closed
5/14/2011	7:34:09 PM	Helium valve opened
5/14/2011	7:34:09 PM	Main Vac valve opened
5/14/2011	7:34:09 PM	Bypass valve opened
5/14/2011	7:34:09 PM	Helium MFC set to  100.000000
5/14/2011	7:34:09 PM	H2 MFC set to  0.000000
5/14/2011	7:34:09 PM	BCl3 MFC set to  0.000000
5/14/2011	7:34:09 PM	PHl3 MFC set to  0.000000
5/14/2011	7:34:09 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:34:09 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:34:09 PM	Tube furnace set to 0
5/14/2011	7:35:09 PM	Helium valve closed
5/14/2011	7:35:09 PM	H2 valve closed
5/14/2011	7:35:09 PM	BCl3 valve closed
5/14/2011	7:35:09 PM	PH3 valve closed
5/14/2011	7:35:09 PM	SiCl4 pre valve closed
5/14/2011	7:35:09 PM	SiCl4 post valve closed
5/14/2011	7:35:09 PM	Bubbler valve closed
5/14/2011	7:35:09 PM	Main Vac valve opened
5/14/2011	7:35:09 PM	Bypass valve opened
5/14/2011	7:35:09 PM	Helium MFC set to  0.000000
5/14/2011	7:35:09 PM	H2 MFC set to  0.000000
5/14/2011	7:35:09 PM	BCl3 MFC set to  0.000000
5/14/2011	7:35:09 PM	PHl3 MFC set to  0.000000
5/14/2011	7:35:09 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:35:09 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:35:09 PM	Tube furnace set to 0
5/14/2011	7:36:09 PM	H2 valve closed
5/14/2011	7:36:09 PM	BCl3 valve closed
5/14/2011	7:36:09 PM	PH3 valve closed
5/14/2011	7:36:09 PM	SiCl4 pre valve closed
5/14/2011	7:36:09 PM	SiCl4 post valve closed
5/14/2011	7:36:09 PM	Bubbler valve closed
5/14/2011	7:36:09 PM	Helium valve opened
5/14/2011	7:36:09 PM	Main Vac valve opened
5/14/2011	7:36:09 PM	Bypass valve opened
5/14/2011	7:36:09 PM	Helium MFC set to  100.000000
5/14/2011	7:36:09 PM	H2 MFC set to  0.000000
5/14/2011	7:36:09 PM	BCl3 MFC set to  0.000000
5/14/2011	7:36:09 PM	PHl3 MFC set to  0.000000
5/14/2011	7:36:09 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:36:09 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:36:09 PM	Tube furnace set to 0
5/14/2011	7:37:09 PM	Helium valve closed
5/14/2011	7:37:09 PM	H2 valve closed
5/14/2011	7:37:09 PM	BCl3 valve closed
5/14/2011	7:37:09 PM	PH3 valve closed
5/14/2011	7:37:09 PM	SiCl4 pre valve closed
5/14/2011	7:37:09 PM	SiCl4 post valve closed
5/14/2011	7:37:09 PM	Bubbler valve closed
5/14/2011	7:37:09 PM	Main Vac valve opened
5/14/2011	7:37:09 PM	Bypass valve opened
5/14/2011	7:37:09 PM	Helium MFC set to  0.000000
5/14/2011	7:37:09 PM	H2 MFC set to  0.000000
5/14/2011	7:37:09 PM	BCl3 MFC set to  0.000000
5/14/2011	7:37:09 PM	PHl3 MFC set to  0.000000
5/14/2011	7:37:09 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:37:09 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:37:09 PM	Tube furnace set to 0
5/14/2011	7:38:09 PM	H2 valve closed
5/14/2011	7:38:09 PM	BCl3 valve closed
5/14/2011	7:38:09 PM	PH3 valve closed
5/14/2011	7:38:09 PM	SiCl4 pre valve closed
5/14/2011	7:38:09 PM	SiCl4 post valve closed
5/14/2011	7:38:09 PM	Bubbler valve closed
5/14/2011	7:38:09 PM	Helium valve opened
5/14/2011	7:38:09 PM	Main Vac valve opened
5/14/2011	7:38:09 PM	Bypass valve opened
5/14/2011	7:38:09 PM	Helium MFC set to  100.000000
5/14/2011	7:38:09 PM	H2 MFC set to  0.000000
5/14/2011	7:38:09 PM	BCl3 MFC set to  0.000000
5/14/2011	7:38:09 PM	PHl3 MFC set to  0.000000
5/14/2011	7:38:10 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:38:10 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:38:10 PM	Tube furnace set to 0
5/14/2011	7:39:10 PM	Helium valve closed
5/14/2011	7:39:10 PM	H2 valve closed
5/14/2011	7:39:10 PM	BCl3 valve closed
5/14/2011	7:39:10 PM	PH3 valve closed
5/14/2011	7:39:10 PM	SiCl4 pre valve closed
5/14/2011	7:39:10 PM	SiCl4 post valve closed
5/14/2011	7:39:10 PM	Bubbler valve closed
5/14/2011	7:39:10 PM	Main Vac valve opened
5/14/2011	7:39:10 PM	Bypass valve opened
5/14/2011	7:39:10 PM	Helium MFC set to  0.000000
5/14/2011	7:39:10 PM	H2 MFC set to  0.000000
5/14/2011	7:39:10 PM	BCl3 MFC set to  0.000000
5/14/2011	7:39:10 PM	PHl3 MFC set to  0.000000
5/14/2011	7:39:10 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:39:10 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:39:10 PM	Tube furnace set to 0
5/14/2011	7:39:11 PM	Run finished at 7:39 PM
5/14/2011	7:39:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/14/2011	7:40:52 PM	Recipe started at 7:40 PM
5/14/2011	7:40:52 PM	Helium valve closed
5/14/2011	7:40:52 PM	BCl3 valve closed
5/14/2011	7:40:52 PM	PH3 valve closed
5/14/2011	7:40:52 PM	SiCl4 pre valve closed
5/14/2011	7:40:52 PM	SiCl4 post valve closed
5/14/2011	7:40:52 PM	Main Vac valve closed
5/14/2011	7:40:52 PM	Bypass valve closed
5/14/2011	7:40:52 PM	Bubbler valve closed
5/14/2011	7:40:52 PM	H2 valve opened
5/14/2011	7:40:52 PM	Helium MFC set to  0.000000
5/14/2011	7:40:52 PM	H2 MFC set to  500.000000
5/14/2011	7:40:52 PM	BCl3 MFC set to  0.000000
5/14/2011	7:40:52 PM	PHl3 MFC set to  0.000000
5/14/2011	7:40:52 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:40:52 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:40:52 PM	Tube furnace set to 0
5/14/2011	7:42:15 PM	Helium valve closed
5/14/2011	7:42:15 PM	BCl3 valve closed
5/14/2011	7:42:15 PM	PH3 valve closed
5/14/2011	7:42:15 PM	SiCl4 pre valve closed
5/14/2011	7:42:15 PM	SiCl4 post valve closed
5/14/2011	7:42:15 PM	Main Vac valve closed
5/14/2011	7:42:15 PM	Bypass valve closed
5/14/2011	7:42:15 PM	H2 valve opened
5/14/2011	7:42:15 PM	Bubbler valve opened
5/14/2011	7:42:15 PM	Helium MFC set to  0.000000
5/14/2011	7:42:15 PM	H2 MFC set to  500.000000
5/14/2011	7:42:15 PM	BCl3 MFC set to  0.000000
5/14/2011	7:42:15 PM	PHl3 MFC set to  0.000000
5/14/2011	7:42:15 PM	SiCl4 MFC set to  0.000000
5/14/2011	7:42:15 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	7:42:15 PM	Tube furnace set to 1000
5/14/2011	8:02:15 PM	Helium valve closed
5/14/2011	8:02:15 PM	BCl3 valve closed
5/14/2011	8:02:15 PM	Main Vac valve closed
5/14/2011	8:02:15 PM	Bypass valve closed
5/14/2011	8:02:15 PM	H2 valve opened
5/14/2011	8:02:15 PM	PH3 valve opened
5/14/2011	8:02:15 PM	SiCl4 pre valve opened
5/14/2011	8:02:15 PM	SiCl4 post valve opened
5/14/2011	8:02:15 PM	Bubbler valve opened
5/14/2011	8:02:15 PM	Helium MFC set to  0.000000
5/14/2011	8:02:15 PM	H2 MFC set to  500.000000
5/14/2011	8:02:15 PM	BCl3 MFC set to  0.000000
5/14/2011	8:02:15 PM	PHl3 MFC set to  1.000000
5/14/2011	8:02:15 PM	SiCl4 MFC set to  50.000000
5/14/2011	8:02:15 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	8:02:15 PM	Tube furnace set to 1000
5/14/2011	8:18:15 PM	H2 valve closed
5/14/2011	8:18:15 PM	BCl3 valve closed
5/14/2011	8:18:15 PM	PH3 valve closed
5/14/2011	8:18:15 PM	SiCl4 pre valve closed
5/14/2011	8:18:15 PM	SiCl4 post valve closed
5/14/2011	8:18:15 PM	Main Vac valve closed
5/14/2011	8:18:15 PM	Bypass valve closed
5/14/2011	8:18:15 PM	Helium valve opened
5/14/2011	8:18:15 PM	Bubbler valve opened
5/14/2011	8:18:15 PM	Helium MFC set to  500.000000
5/14/2011	8:18:15 PM	H2 MFC set to  0.000000
5/14/2011	8:18:15 PM	BCl3 MFC set to  0.000000
5/14/2011	8:18:15 PM	PHl3 MFC set to  0.000000
5/14/2011	8:18:15 PM	SiCl4 MFC set to  0.000000
5/14/2011	8:18:15 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	8:18:15 PM	Tube furnace set to 0
5/14/2011	8:38:15 PM	Helium valve closed
5/14/2011	8:38:15 PM	H2 valve closed
5/14/2011	8:38:15 PM	BCl3 valve closed
5/14/2011	8:38:15 PM	PH3 valve closed
5/14/2011	8:38:15 PM	SiCl4 pre valve closed
5/14/2011	8:38:15 PM	SiCl4 post valve closed
5/14/2011	8:38:15 PM	Main Vac valve closed
5/14/2011	8:38:15 PM	Bypass valve closed
5/14/2011	8:38:15 PM	Bubbler valve closed
5/14/2011	8:38:15 PM	Helium MFC set to  0.000000
5/14/2011	8:38:15 PM	H2 MFC set to  0.000000
5/14/2011	8:38:15 PM	BCl3 MFC set to  0.000000
5/14/2011	8:38:15 PM	PHl3 MFC set to  0.000000
5/14/2011	8:38:15 PM	SiCl4 MFC set to  0.000000
5/14/2011	8:38:15 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	8:38:16 PM	Tube furnace set to 0
5/14/2011	8:38:16 PM	Run finished at 8:38 PM
5/14/2011	8:46:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2011	8:46:35 PM	Recipe started at 8:46 PM
5/14/2011	8:46:35 PM	H2 valve closed
5/14/2011	8:46:35 PM	BCl3 valve closed
5/14/2011	8:46:35 PM	PH3 valve closed
5/14/2011	8:46:35 PM	SiCl4 pre valve closed
5/14/2011	8:46:35 PM	SiCl4 post valve closed
5/14/2011	8:46:35 PM	Main Vac valve closed
5/14/2011	8:46:35 PM	Bypass valve closed
5/14/2011	8:46:35 PM	Bubbler valve closed
5/14/2011	8:46:35 PM	Helium valve opened
5/14/2011	8:46:35 PM	Helium MFC set to  500.000000
5/14/2011	8:46:35 PM	H2 MFC set to  0.000000
5/14/2011	8:46:35 PM	BCl3 MFC set to  0.000000
5/14/2011	8:46:35 PM	PHl3 MFC set to  0.000000
5/14/2011	8:46:35 PM	SiCl4 MFC set to  0.000000
5/14/2011	8:46:35 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	8:46:35 PM	Tube furnace set to 0
5/14/2011	8:46:41 PM	Helium valve closed
5/14/2011	8:46:41 PM	H2 valve closed
5/14/2011	8:46:41 PM	BCl3 valve closed
5/14/2011	8:46:41 PM	PH3 valve closed
5/14/2011	8:46:41 PM	SiCl4 pre valve closed
5/14/2011	8:46:41 PM	SiCl4 post valve closed
5/14/2011	8:46:41 PM	Main Vac valve closed
5/14/2011	8:46:41 PM	Bypass valve closed
5/14/2011	8:46:41 PM	Bubbler valve closed
5/14/2011	8:46:41 PM	Helium MFC set to  0.000000
5/14/2011	8:46:41 PM	H2 MFC set to  0.000000
5/14/2011	8:46:41 PM	BCl3 MFC set to  0.000000
5/14/2011	8:46:41 PM	PHl3 MFC set to  0.000000
5/14/2011	8:46:41 PM	SiCl4 MFC set to  0.000000
5/14/2011	8:46:41 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	8:46:41 PM	Tube furnace set to 0
5/14/2011	8:46:42 PM	Run finished at 8:46 PM
5/14/2011	8:46:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2011	8:51:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2011	8:51:32 PM	Recipe started at 8:51 PM
5/14/2011	8:51:32 PM	Helium valve closed
5/14/2011	8:51:32 PM	H2 valve closed
5/14/2011	8:51:32 PM	BCl3 valve closed
5/14/2011	8:51:32 PM	PH3 valve closed
5/14/2011	8:51:32 PM	SiCl4 pre valve closed
5/14/2011	8:51:32 PM	SiCl4 post valve closed
5/14/2011	8:51:32 PM	Main Vac valve closed
5/14/2011	8:51:32 PM	Bubbler valve closed
5/14/2011	8:51:32 PM	Bypass valve opened
5/14/2011	8:51:32 PM	Helium MFC set to  0.000000
5/14/2011	8:51:32 PM	H2 MFC set to  0.000000
5/14/2011	8:51:32 PM	BCl3 MFC set to  0.000000
5/14/2011	8:51:32 PM	PHl3 MFC set to  0.000000
5/14/2011	8:51:32 PM	SiCl4 MFC set to  0.000000
5/14/2011	8:51:32 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	8:51:32 PM	Tube furnace set to 0
5/14/2011	8:52:04 PM	Helium valve closed
5/14/2011	8:52:04 PM	H2 valve closed
5/14/2011	8:52:04 PM	BCl3 valve closed
5/14/2011	8:52:04 PM	PH3 valve closed
5/14/2011	8:52:04 PM	SiCl4 pre valve closed
5/14/2011	8:52:04 PM	SiCl4 post valve closed
5/14/2011	8:52:04 PM	Bubbler valve closed
5/14/2011	8:52:04 PM	Main Vac valve opened
5/14/2011	8:52:04 PM	Bypass valve opened
5/14/2011	8:52:04 PM	Helium MFC set to  0.000000
5/14/2011	8:52:04 PM	H2 MFC set to  0.000000
5/14/2011	8:52:04 PM	BCl3 MFC set to  0.000000
5/14/2011	8:52:04 PM	PHl3 MFC set to  0.000000
5/14/2011	8:52:04 PM	SiCl4 MFC set to  0.000000
5/14/2011	8:52:04 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	8:52:04 PM	Tube furnace set to 0
5/14/2011	8:52:04 PM	Run finished at 8:52 PM
5/14/2011	8:52:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2011	10:09:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/14/2011	10:09:28 PM	Recipe started at 10:09 PM
5/14/2011	10:09:28 PM	Helium valve closed
5/14/2011	10:09:28 PM	H2 valve closed
5/14/2011	10:09:28 PM	BCl3 valve closed
5/14/2011	10:09:28 PM	PH3 valve closed
5/14/2011	10:09:28 PM	SiCl4 pre valve closed
5/14/2011	10:09:28 PM	SiCl4 post valve closed
5/14/2011	10:09:28 PM	Main Vac valve closed
5/14/2011	10:09:28 PM	Bubbler valve closed
5/14/2011	10:09:28 PM	Bypass valve opened
5/14/2011	10:09:28 PM	Helium MFC set to  0.000000
5/14/2011	10:09:28 PM	H2 MFC set to  0.000000
5/14/2011	10:09:28 PM	BCl3 MFC set to  0.000000
5/14/2011	10:09:28 PM	PHl3 MFC set to  0.000000
5/14/2011	10:09:28 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:09:28 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:09:28 PM	Tube furnace set to 0
5/14/2011	10:09:29 PM	Helium valve closed
5/14/2011	10:09:29 PM	H2 valve closed
5/14/2011	10:09:29 PM	BCl3 valve closed
5/14/2011	10:09:29 PM	PH3 valve closed
5/14/2011	10:09:29 PM	SiCl4 pre valve closed
5/14/2011	10:09:29 PM	SiCl4 post valve closed
5/14/2011	10:09:29 PM	Bubbler valve closed
5/14/2011	10:09:29 PM	Main Vac valve opened
5/14/2011	10:09:29 PM	Bypass valve opened
5/14/2011	10:09:29 PM	Helium MFC set to  0.000000
5/14/2011	10:09:29 PM	H2 MFC set to  0.000000
5/14/2011	10:09:29 PM	BCl3 MFC set to  0.000000
5/14/2011	10:09:29 PM	PHl3 MFC set to  0.000000
5/14/2011	10:09:29 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:09:29 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:09:29 PM	Tube furnace set to 0
5/14/2011	10:10:29 PM	H2 valve closed
5/14/2011	10:10:29 PM	BCl3 valve closed
5/14/2011	10:10:29 PM	PH3 valve closed
5/14/2011	10:10:29 PM	SiCl4 pre valve closed
5/14/2011	10:10:29 PM	SiCl4 post valve closed
5/14/2011	10:10:29 PM	Bubbler valve closed
5/14/2011	10:10:29 PM	Helium valve opened
5/14/2011	10:10:29 PM	Main Vac valve opened
5/14/2011	10:10:29 PM	Bypass valve opened
5/14/2011	10:10:29 PM	Helium MFC set to  100.000000
5/14/2011	10:10:29 PM	H2 MFC set to  0.000000
5/14/2011	10:10:29 PM	BCl3 MFC set to  0.000000
5/14/2011	10:10:29 PM	PHl3 MFC set to  0.000000
5/14/2011	10:10:29 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:10:29 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:10:29 PM	Tube furnace set to 0
5/14/2011	10:11:29 PM	Helium valve closed
5/14/2011	10:11:29 PM	H2 valve closed
5/14/2011	10:11:29 PM	BCl3 valve closed
5/14/2011	10:11:29 PM	PH3 valve closed
5/14/2011	10:11:29 PM	SiCl4 pre valve closed
5/14/2011	10:11:29 PM	SiCl4 post valve closed
5/14/2011	10:11:29 PM	Bubbler valve closed
5/14/2011	10:11:29 PM	Main Vac valve opened
5/14/2011	10:11:29 PM	Bypass valve opened
5/14/2011	10:11:29 PM	Helium MFC set to  0.000000
5/14/2011	10:11:29 PM	H2 MFC set to  0.000000
5/14/2011	10:11:29 PM	BCl3 MFC set to  0.000000
5/14/2011	10:11:29 PM	PHl3 MFC set to  0.000000
5/14/2011	10:11:29 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:11:29 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:11:29 PM	Tube furnace set to 0
5/14/2011	10:12:29 PM	H2 valve closed
5/14/2011	10:12:29 PM	BCl3 valve closed
5/14/2011	10:12:29 PM	PH3 valve closed
5/14/2011	10:12:29 PM	SiCl4 pre valve closed
5/14/2011	10:12:29 PM	SiCl4 post valve closed
5/14/2011	10:12:29 PM	Bubbler valve closed
5/14/2011	10:12:29 PM	Helium valve opened
5/14/2011	10:12:29 PM	Main Vac valve opened
5/14/2011	10:12:29 PM	Bypass valve opened
5/14/2011	10:12:29 PM	Helium MFC set to  100.000000
5/14/2011	10:12:29 PM	H2 MFC set to  0.000000
5/14/2011	10:12:29 PM	BCl3 MFC set to  0.000000
5/14/2011	10:12:29 PM	PHl3 MFC set to  0.000000
5/14/2011	10:12:29 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:12:29 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:12:30 PM	Tube furnace set to 0
5/14/2011	10:13:30 PM	Helium valve closed
5/14/2011	10:13:30 PM	H2 valve closed
5/14/2011	10:13:30 PM	BCl3 valve closed
5/14/2011	10:13:30 PM	PH3 valve closed
5/14/2011	10:13:30 PM	SiCl4 pre valve closed
5/14/2011	10:13:30 PM	SiCl4 post valve closed
5/14/2011	10:13:30 PM	Bubbler valve closed
5/14/2011	10:13:30 PM	Main Vac valve opened
5/14/2011	10:13:30 PM	Bypass valve opened
5/14/2011	10:13:30 PM	Helium MFC set to  0.000000
5/14/2011	10:13:30 PM	H2 MFC set to  0.000000
5/14/2011	10:13:30 PM	BCl3 MFC set to  0.000000
5/14/2011	10:13:30 PM	PHl3 MFC set to  0.000000
5/14/2011	10:13:30 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:13:30 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:13:30 PM	Tube furnace set to 0
5/14/2011	10:14:30 PM	H2 valve closed
5/14/2011	10:14:30 PM	BCl3 valve closed
5/14/2011	10:14:30 PM	PH3 valve closed
5/14/2011	10:14:30 PM	SiCl4 pre valve closed
5/14/2011	10:14:30 PM	SiCl4 post valve closed
5/14/2011	10:14:30 PM	Bubbler valve closed
5/14/2011	10:14:30 PM	Helium valve opened
5/14/2011	10:14:30 PM	Main Vac valve opened
5/14/2011	10:14:30 PM	Bypass valve opened
5/14/2011	10:14:30 PM	Helium MFC set to  100.000000
5/14/2011	10:14:30 PM	H2 MFC set to  0.000000
5/14/2011	10:14:30 PM	BCl3 MFC set to  0.000000
5/14/2011	10:14:30 PM	PHl3 MFC set to  0.000000
5/14/2011	10:14:30 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:14:30 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:14:30 PM	Tube furnace set to 0
5/14/2011	10:15:30 PM	Helium valve closed
5/14/2011	10:15:30 PM	H2 valve closed
5/14/2011	10:15:30 PM	BCl3 valve closed
5/14/2011	10:15:30 PM	PH3 valve closed
5/14/2011	10:15:30 PM	SiCl4 pre valve closed
5/14/2011	10:15:30 PM	SiCl4 post valve closed
5/14/2011	10:15:30 PM	Bubbler valve closed
5/14/2011	10:15:30 PM	Main Vac valve opened
5/14/2011	10:15:30 PM	Bypass valve opened
5/14/2011	10:15:30 PM	Helium MFC set to  0.000000
5/14/2011	10:15:30 PM	H2 MFC set to  0.000000
5/14/2011	10:15:30 PM	BCl3 MFC set to  0.000000
5/14/2011	10:15:30 PM	PHl3 MFC set to  0.000000
5/14/2011	10:15:30 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:15:30 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:15:30 PM	Tube furnace set to 0
5/14/2011	10:16:30 PM	H2 valve closed
5/14/2011	10:16:30 PM	BCl3 valve closed
5/14/2011	10:16:30 PM	PH3 valve closed
5/14/2011	10:16:30 PM	SiCl4 pre valve closed
5/14/2011	10:16:30 PM	SiCl4 post valve closed
5/14/2011	10:16:30 PM	Bubbler valve closed
5/14/2011	10:16:30 PM	Helium valve opened
5/14/2011	10:16:30 PM	Main Vac valve opened
5/14/2011	10:16:30 PM	Bypass valve opened
5/14/2011	10:16:30 PM	Helium MFC set to  100.000000
5/14/2011	10:16:30 PM	H2 MFC set to  0.000000
5/14/2011	10:16:30 PM	BCl3 MFC set to  0.000000
5/14/2011	10:16:30 PM	PHl3 MFC set to  0.000000
5/14/2011	10:16:30 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:16:30 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:16:30 PM	Tube furnace set to 0
5/14/2011	10:17:30 PM	Helium valve closed
5/14/2011	10:17:30 PM	H2 valve closed
5/14/2011	10:17:30 PM	BCl3 valve closed
5/14/2011	10:17:30 PM	PH3 valve closed
5/14/2011	10:17:30 PM	SiCl4 pre valve closed
5/14/2011	10:17:30 PM	SiCl4 post valve closed
5/14/2011	10:17:30 PM	Bubbler valve closed
5/14/2011	10:17:30 PM	Main Vac valve opened
5/14/2011	10:17:30 PM	Bypass valve opened
5/14/2011	10:17:30 PM	Helium MFC set to  0.000000
5/14/2011	10:17:30 PM	H2 MFC set to  0.000000
5/14/2011	10:17:30 PM	BCl3 MFC set to  0.000000
5/14/2011	10:17:30 PM	PHl3 MFC set to  0.000000
5/14/2011	10:17:30 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:17:30 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:17:31 PM	Tube furnace set to 0
5/14/2011	10:18:31 PM	H2 valve closed
5/14/2011	10:18:31 PM	BCl3 valve closed
5/14/2011	10:18:31 PM	PH3 valve closed
5/14/2011	10:18:31 PM	SiCl4 pre valve closed
5/14/2011	10:18:31 PM	SiCl4 post valve closed
5/14/2011	10:18:31 PM	Bubbler valve closed
5/14/2011	10:18:31 PM	Helium valve opened
5/14/2011	10:18:31 PM	Main Vac valve opened
5/14/2011	10:18:31 PM	Bypass valve opened
5/14/2011	10:18:31 PM	Helium MFC set to  100.000000
5/14/2011	10:18:31 PM	H2 MFC set to  0.000000
5/14/2011	10:18:31 PM	BCl3 MFC set to  0.000000
5/14/2011	10:18:31 PM	PHl3 MFC set to  0.000000
5/14/2011	10:18:31 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:18:31 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:18:31 PM	Tube furnace set to 0
5/14/2011	10:19:31 PM	Helium valve closed
5/14/2011	10:19:31 PM	H2 valve closed
5/14/2011	10:19:31 PM	BCl3 valve closed
5/14/2011	10:19:31 PM	PH3 valve closed
5/14/2011	10:19:31 PM	SiCl4 pre valve closed
5/14/2011	10:19:31 PM	SiCl4 post valve closed
5/14/2011	10:19:31 PM	Bubbler valve closed
5/14/2011	10:19:31 PM	Main Vac valve opened
5/14/2011	10:19:31 PM	Bypass valve opened
5/14/2011	10:19:31 PM	Helium MFC set to  0.000000
5/14/2011	10:19:31 PM	H2 MFC set to  0.000000
5/14/2011	10:19:31 PM	BCl3 MFC set to  0.000000
5/14/2011	10:19:31 PM	PHl3 MFC set to  0.000000
5/14/2011	10:19:31 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:19:31 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:19:31 PM	Tube furnace set to 0
5/14/2011	10:20:31 PM	H2 valve closed
5/14/2011	10:20:31 PM	BCl3 valve closed
5/14/2011	10:20:31 PM	PH3 valve closed
5/14/2011	10:20:31 PM	SiCl4 pre valve closed
5/14/2011	10:20:31 PM	SiCl4 post valve closed
5/14/2011	10:20:31 PM	Bubbler valve closed
5/14/2011	10:20:31 PM	Helium valve opened
5/14/2011	10:20:31 PM	Main Vac valve opened
5/14/2011	10:20:31 PM	Bypass valve opened
5/14/2011	10:20:31 PM	Helium MFC set to  100.000000
5/14/2011	10:20:31 PM	H2 MFC set to  0.000000
5/14/2011	10:20:31 PM	BCl3 MFC set to  0.000000
5/14/2011	10:20:31 PM	PHl3 MFC set to  0.000000
5/14/2011	10:20:31 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:20:31 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:20:31 PM	Tube furnace set to 0
5/14/2011	10:21:31 PM	Helium valve closed
5/14/2011	10:21:31 PM	H2 valve closed
5/14/2011	10:21:31 PM	BCl3 valve closed
5/14/2011	10:21:31 PM	PH3 valve closed
5/14/2011	10:21:31 PM	SiCl4 pre valve closed
5/14/2011	10:21:31 PM	SiCl4 post valve closed
5/14/2011	10:21:31 PM	Bubbler valve closed
5/14/2011	10:21:31 PM	Main Vac valve opened
5/14/2011	10:21:31 PM	Bypass valve opened
5/14/2011	10:21:31 PM	Helium MFC set to  0.000000
5/14/2011	10:21:31 PM	H2 MFC set to  0.000000
5/14/2011	10:21:31 PM	BCl3 MFC set to  0.000000
5/14/2011	10:21:31 PM	PHl3 MFC set to  0.000000
5/14/2011	10:21:31 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:21:31 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:21:31 PM	Tube furnace set to 0
5/14/2011	10:22:31 PM	H2 valve closed
5/14/2011	10:22:31 PM	BCl3 valve closed
5/14/2011	10:22:31 PM	PH3 valve closed
5/14/2011	10:22:31 PM	SiCl4 pre valve closed
5/14/2011	10:22:31 PM	SiCl4 post valve closed
5/14/2011	10:22:31 PM	Bubbler valve closed
5/14/2011	10:22:31 PM	Helium valve opened
5/14/2011	10:22:31 PM	Main Vac valve opened
5/14/2011	10:22:31 PM	Bypass valve opened
5/14/2011	10:22:31 PM	Helium MFC set to  100.000000
5/14/2011	10:22:31 PM	H2 MFC set to  0.000000
5/14/2011	10:22:31 PM	BCl3 MFC set to  0.000000
5/14/2011	10:22:31 PM	PHl3 MFC set to  0.000000
5/14/2011	10:22:31 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:22:31 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:22:32 PM	Tube furnace set to 0
5/14/2011	10:23:32 PM	Helium valve closed
5/14/2011	10:23:32 PM	H2 valve closed
5/14/2011	10:23:32 PM	BCl3 valve closed
5/14/2011	10:23:32 PM	PH3 valve closed
5/14/2011	10:23:32 PM	SiCl4 pre valve closed
5/14/2011	10:23:32 PM	SiCl4 post valve closed
5/14/2011	10:23:32 PM	Bubbler valve closed
5/14/2011	10:23:32 PM	Main Vac valve opened
5/14/2011	10:23:32 PM	Bypass valve opened
5/14/2011	10:23:32 PM	Helium MFC set to  0.000000
5/14/2011	10:23:32 PM	H2 MFC set to  0.000000
5/14/2011	10:23:32 PM	BCl3 MFC set to  0.000000
5/14/2011	10:23:32 PM	PHl3 MFC set to  0.000000
5/14/2011	10:23:32 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:23:32 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:23:32 PM	Tube furnace set to 0
5/14/2011	10:24:32 PM	H2 valve closed
5/14/2011	10:24:32 PM	BCl3 valve closed
5/14/2011	10:24:32 PM	PH3 valve closed
5/14/2011	10:24:32 PM	SiCl4 pre valve closed
5/14/2011	10:24:32 PM	SiCl4 post valve closed
5/14/2011	10:24:32 PM	Bubbler valve closed
5/14/2011	10:24:32 PM	Helium valve opened
5/14/2011	10:24:32 PM	Main Vac valve opened
5/14/2011	10:24:32 PM	Bypass valve opened
5/14/2011	10:24:32 PM	Helium MFC set to  100.000000
5/14/2011	10:24:32 PM	H2 MFC set to  0.000000
5/14/2011	10:24:32 PM	BCl3 MFC set to  0.000000
5/14/2011	10:24:32 PM	PHl3 MFC set to  0.000000
5/14/2011	10:24:32 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:24:32 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:24:32 PM	Tube furnace set to 0
5/14/2011	10:25:32 PM	Helium valve closed
5/14/2011	10:25:32 PM	H2 valve closed
5/14/2011	10:25:32 PM	BCl3 valve closed
5/14/2011	10:25:32 PM	PH3 valve closed
5/14/2011	10:25:32 PM	SiCl4 pre valve closed
5/14/2011	10:25:32 PM	SiCl4 post valve closed
5/14/2011	10:25:32 PM	Bubbler valve closed
5/14/2011	10:25:32 PM	Main Vac valve opened
5/14/2011	10:25:32 PM	Bypass valve opened
5/14/2011	10:25:32 PM	Helium MFC set to  0.000000
5/14/2011	10:25:32 PM	H2 MFC set to  0.000000
5/14/2011	10:25:32 PM	BCl3 MFC set to  0.000000
5/14/2011	10:25:32 PM	PHl3 MFC set to  0.000000
5/14/2011	10:25:32 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:25:32 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:25:32 PM	Tube furnace set to 0
5/14/2011	10:26:32 PM	H2 valve closed
5/14/2011	10:26:32 PM	BCl3 valve closed
5/14/2011	10:26:32 PM	PH3 valve closed
5/14/2011	10:26:32 PM	SiCl4 pre valve closed
5/14/2011	10:26:32 PM	SiCl4 post valve closed
5/14/2011	10:26:32 PM	Bubbler valve closed
5/14/2011	10:26:32 PM	Helium valve opened
5/14/2011	10:26:32 PM	Main Vac valve opened
5/14/2011	10:26:32 PM	Bypass valve opened
5/14/2011	10:26:32 PM	Helium MFC set to  100.000000
5/14/2011	10:26:32 PM	H2 MFC set to  0.000000
5/14/2011	10:26:32 PM	BCl3 MFC set to  0.000000
5/14/2011	10:26:32 PM	PHl3 MFC set to  0.000000
5/14/2011	10:26:32 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:26:32 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:26:32 PM	Tube furnace set to 0
5/14/2011	10:27:32 PM	Helium valve closed
5/14/2011	10:27:32 PM	H2 valve closed
5/14/2011	10:27:32 PM	BCl3 valve closed
5/14/2011	10:27:32 PM	PH3 valve closed
5/14/2011	10:27:32 PM	SiCl4 pre valve closed
5/14/2011	10:27:32 PM	SiCl4 post valve closed
5/14/2011	10:27:32 PM	Bubbler valve closed
5/14/2011	10:27:32 PM	Main Vac valve opened
5/14/2011	10:27:32 PM	Bypass valve opened
5/14/2011	10:27:32 PM	Helium MFC set to  0.000000
5/14/2011	10:27:32 PM	H2 MFC set to  0.000000
5/14/2011	10:27:32 PM	BCl3 MFC set to  0.000000
5/14/2011	10:27:32 PM	PHl3 MFC set to  0.000000
5/14/2011	10:27:32 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:27:32 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:27:33 PM	Tube furnace set to 0
5/14/2011	10:28:33 PM	H2 valve closed
5/14/2011	10:28:33 PM	BCl3 valve closed
5/14/2011	10:28:33 PM	PH3 valve closed
5/14/2011	10:28:33 PM	SiCl4 pre valve closed
5/14/2011	10:28:33 PM	SiCl4 post valve closed
5/14/2011	10:28:33 PM	Bubbler valve closed
5/14/2011	10:28:33 PM	Helium valve opened
5/14/2011	10:28:33 PM	Main Vac valve opened
5/14/2011	10:28:33 PM	Bypass valve opened
5/14/2011	10:28:33 PM	Helium MFC set to  100.000000
5/14/2011	10:28:33 PM	H2 MFC set to  0.000000
5/14/2011	10:28:33 PM	BCl3 MFC set to  0.000000
5/14/2011	10:28:33 PM	PHl3 MFC set to  0.000000
5/14/2011	10:28:33 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:28:33 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:28:33 PM	Tube furnace set to 0
5/14/2011	10:29:33 PM	Helium valve closed
5/14/2011	10:29:33 PM	H2 valve closed
5/14/2011	10:29:33 PM	BCl3 valve closed
5/14/2011	10:29:33 PM	PH3 valve closed
5/14/2011	10:29:33 PM	SiCl4 pre valve closed
5/14/2011	10:29:33 PM	SiCl4 post valve closed
5/14/2011	10:29:33 PM	Bubbler valve closed
5/14/2011	10:29:33 PM	Main Vac valve opened
5/14/2011	10:29:33 PM	Bypass valve opened
5/14/2011	10:29:33 PM	Helium MFC set to  0.000000
5/14/2011	10:29:33 PM	H2 MFC set to  0.000000
5/14/2011	10:29:33 PM	BCl3 MFC set to  0.000000
5/14/2011	10:29:33 PM	PHl3 MFC set to  0.000000
5/14/2011	10:29:33 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:29:33 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:29:33 PM	Tube furnace set to 0
5/14/2011	10:29:34 PM	Run finished at 10:29 PM
5/14/2011	10:29:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/14/2011	10:30:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/14/2011	10:30:17 PM	Recipe started at 10:30 PM
5/14/2011	10:30:17 PM	Helium valve closed
5/14/2011	10:30:17 PM	H2 valve closed
5/14/2011	10:30:17 PM	BCl3 valve closed
5/14/2011	10:30:17 PM	PH3 valve closed
5/14/2011	10:30:17 PM	SiCl4 pre valve closed
5/14/2011	10:30:17 PM	SiCl4 post valve closed
5/14/2011	10:30:17 PM	Main Vac valve closed
5/14/2011	10:30:17 PM	Bubbler valve closed
5/14/2011	10:30:17 PM	Bypass valve opened
5/14/2011	10:30:17 PM	Helium MFC set to  0.000000
5/14/2011	10:30:17 PM	H2 MFC set to  0.000000
5/14/2011	10:30:17 PM	BCl3 MFC set to  0.000000
5/14/2011	10:30:17 PM	PHl3 MFC set to  0.000000
5/14/2011	10:30:17 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:30:17 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:30:17 PM	Tube furnace set to 0
5/14/2011	10:30:17 PM	Helium valve closed
5/14/2011	10:30:18 PM	H2 valve closed
5/14/2011	10:30:18 PM	BCl3 valve closed
5/14/2011	10:30:18 PM	PH3 valve closed
5/14/2011	10:30:18 PM	SiCl4 pre valve closed
5/14/2011	10:30:18 PM	SiCl4 post valve closed
5/14/2011	10:30:18 PM	Bubbler valve closed
5/14/2011	10:30:18 PM	Main Vac valve opened
5/14/2011	10:30:18 PM	Bypass valve opened
5/14/2011	10:30:18 PM	Helium MFC set to  0.000000
5/14/2011	10:30:18 PM	H2 MFC set to  0.000000
5/14/2011	10:30:18 PM	BCl3 MFC set to  0.000000
5/14/2011	10:30:18 PM	PHl3 MFC set to  0.000000
5/14/2011	10:30:18 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:30:18 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:30:18 PM	Tube furnace set to 0
5/14/2011	10:31:18 PM	H2 valve closed
5/14/2011	10:31:18 PM	BCl3 valve closed
5/14/2011	10:31:18 PM	PH3 valve closed
5/14/2011	10:31:18 PM	SiCl4 pre valve closed
5/14/2011	10:31:18 PM	SiCl4 post valve closed
5/14/2011	10:31:18 PM	Bubbler valve closed
5/14/2011	10:31:18 PM	Helium valve opened
5/14/2011	10:31:18 PM	Main Vac valve opened
5/14/2011	10:31:18 PM	Bypass valve opened
5/14/2011	10:31:18 PM	Helium MFC set to  100.000000
5/14/2011	10:31:18 PM	H2 MFC set to  0.000000
5/14/2011	10:31:18 PM	BCl3 MFC set to  0.000000
5/14/2011	10:31:18 PM	PHl3 MFC set to  0.000000
5/14/2011	10:31:18 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:31:18 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:31:18 PM	Tube furnace set to 0
5/14/2011	10:32:18 PM	Helium valve closed
5/14/2011	10:32:18 PM	H2 valve closed
5/14/2011	10:32:18 PM	BCl3 valve closed
5/14/2011	10:32:18 PM	PH3 valve closed
5/14/2011	10:32:18 PM	SiCl4 pre valve closed
5/14/2011	10:32:18 PM	SiCl4 post valve closed
5/14/2011	10:32:18 PM	Bubbler valve closed
5/14/2011	10:32:18 PM	Main Vac valve opened
5/14/2011	10:32:18 PM	Bypass valve opened
5/14/2011	10:32:18 PM	Helium MFC set to  0.000000
5/14/2011	10:32:18 PM	H2 MFC set to  0.000000
5/14/2011	10:32:18 PM	BCl3 MFC set to  0.000000
5/14/2011	10:32:18 PM	PHl3 MFC set to  0.000000
5/14/2011	10:32:18 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:32:18 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:32:18 PM	Tube furnace set to 0
5/14/2011	10:33:18 PM	H2 valve closed
5/14/2011	10:33:18 PM	BCl3 valve closed
5/14/2011	10:33:18 PM	PH3 valve closed
5/14/2011	10:33:18 PM	SiCl4 pre valve closed
5/14/2011	10:33:18 PM	SiCl4 post valve closed
5/14/2011	10:33:18 PM	Bubbler valve closed
5/14/2011	10:33:18 PM	Helium valve opened
5/14/2011	10:33:18 PM	Main Vac valve opened
5/14/2011	10:33:18 PM	Bypass valve opened
5/14/2011	10:33:18 PM	Helium MFC set to  100.000000
5/14/2011	10:33:18 PM	H2 MFC set to  0.000000
5/14/2011	10:33:18 PM	BCl3 MFC set to  0.000000
5/14/2011	10:33:18 PM	PHl3 MFC set to  0.000000
5/14/2011	10:33:18 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:33:18 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:33:18 PM	Tube furnace set to 0
5/14/2011	10:34:18 PM	Helium valve closed
5/14/2011	10:34:18 PM	H2 valve closed
5/14/2011	10:34:18 PM	BCl3 valve closed
5/14/2011	10:34:18 PM	PH3 valve closed
5/14/2011	10:34:18 PM	SiCl4 pre valve closed
5/14/2011	10:34:18 PM	SiCl4 post valve closed
5/14/2011	10:34:18 PM	Bubbler valve closed
5/14/2011	10:34:18 PM	Main Vac valve opened
5/14/2011	10:34:18 PM	Bypass valve opened
5/14/2011	10:34:18 PM	Helium MFC set to  0.000000
5/14/2011	10:34:18 PM	H2 MFC set to  0.000000
5/14/2011	10:34:18 PM	BCl3 MFC set to  0.000000
5/14/2011	10:34:18 PM	PHl3 MFC set to  0.000000
5/14/2011	10:34:18 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:34:18 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:34:18 PM	Tube furnace set to 0
5/14/2011	10:35:19 PM	H2 valve closed
5/14/2011	10:35:19 PM	BCl3 valve closed
5/14/2011	10:35:19 PM	PH3 valve closed
5/14/2011	10:35:19 PM	SiCl4 pre valve closed
5/14/2011	10:35:19 PM	SiCl4 post valve closed
5/14/2011	10:35:19 PM	Bubbler valve closed
5/14/2011	10:35:19 PM	Helium valve opened
5/14/2011	10:35:19 PM	Main Vac valve opened
5/14/2011	10:35:19 PM	Bypass valve opened
5/14/2011	10:35:19 PM	Helium MFC set to  100.000000
5/14/2011	10:35:19 PM	H2 MFC set to  0.000000
5/14/2011	10:35:19 PM	BCl3 MFC set to  0.000000
5/14/2011	10:35:19 PM	PHl3 MFC set to  0.000000
5/14/2011	10:35:19 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:35:19 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:35:19 PM	Tube furnace set to 0
5/14/2011	10:36:19 PM	Helium valve closed
5/14/2011	10:36:19 PM	H2 valve closed
5/14/2011	10:36:19 PM	BCl3 valve closed
5/14/2011	10:36:19 PM	PH3 valve closed
5/14/2011	10:36:19 PM	SiCl4 pre valve closed
5/14/2011	10:36:19 PM	SiCl4 post valve closed
5/14/2011	10:36:19 PM	Bubbler valve closed
5/14/2011	10:36:19 PM	Main Vac valve opened
5/14/2011	10:36:19 PM	Bypass valve opened
5/14/2011	10:36:19 PM	Helium MFC set to  0.000000
5/14/2011	10:36:19 PM	H2 MFC set to  0.000000
5/14/2011	10:36:19 PM	BCl3 MFC set to  0.000000
5/14/2011	10:36:19 PM	PHl3 MFC set to  0.000000
5/14/2011	10:36:19 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:36:19 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:36:19 PM	Tube furnace set to 0
5/14/2011	10:37:19 PM	H2 valve closed
5/14/2011	10:37:19 PM	BCl3 valve closed
5/14/2011	10:37:19 PM	PH3 valve closed
5/14/2011	10:37:19 PM	SiCl4 pre valve closed
5/14/2011	10:37:19 PM	SiCl4 post valve closed
5/14/2011	10:37:19 PM	Bubbler valve closed
5/14/2011	10:37:19 PM	Helium valve opened
5/14/2011	10:37:19 PM	Main Vac valve opened
5/14/2011	10:37:19 PM	Bypass valve opened
5/14/2011	10:37:19 PM	Helium MFC set to  100.000000
5/14/2011	10:37:19 PM	H2 MFC set to  0.000000
5/14/2011	10:37:19 PM	BCl3 MFC set to  0.000000
5/14/2011	10:37:19 PM	PHl3 MFC set to  0.000000
5/14/2011	10:37:19 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:37:19 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:37:19 PM	Tube furnace set to 0
5/14/2011	10:38:19 PM	Helium valve closed
5/14/2011	10:38:19 PM	H2 valve closed
5/14/2011	10:38:19 PM	BCl3 valve closed
5/14/2011	10:38:19 PM	PH3 valve closed
5/14/2011	10:38:19 PM	SiCl4 pre valve closed
5/14/2011	10:38:19 PM	SiCl4 post valve closed
5/14/2011	10:38:19 PM	Bubbler valve closed
5/14/2011	10:38:19 PM	Main Vac valve opened
5/14/2011	10:38:19 PM	Bypass valve opened
5/14/2011	10:38:19 PM	Helium MFC set to  0.000000
5/14/2011	10:38:19 PM	H2 MFC set to  0.000000
5/14/2011	10:38:19 PM	BCl3 MFC set to  0.000000
5/14/2011	10:38:19 PM	PHl3 MFC set to  0.000000
5/14/2011	10:38:19 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:38:19 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:38:19 PM	Tube furnace set to 0
5/14/2011	10:39:19 PM	H2 valve closed
5/14/2011	10:39:19 PM	BCl3 valve closed
5/14/2011	10:39:19 PM	PH3 valve closed
5/14/2011	10:39:19 PM	SiCl4 pre valve closed
5/14/2011	10:39:19 PM	SiCl4 post valve closed
5/14/2011	10:39:19 PM	Bubbler valve closed
5/14/2011	10:39:19 PM	Helium valve opened
5/14/2011	10:39:19 PM	Main Vac valve opened
5/14/2011	10:39:19 PM	Bypass valve opened
5/14/2011	10:39:19 PM	Helium MFC set to  100.000000
5/14/2011	10:39:19 PM	H2 MFC set to  0.000000
5/14/2011	10:39:19 PM	BCl3 MFC set to  0.000000
5/14/2011	10:39:19 PM	PHl3 MFC set to  0.000000
5/14/2011	10:39:19 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:39:19 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:39:19 PM	Tube furnace set to 0
5/14/2011	10:40:20 PM	Helium valve closed
5/14/2011	10:40:20 PM	H2 valve closed
5/14/2011	10:40:20 PM	BCl3 valve closed
5/14/2011	10:40:20 PM	PH3 valve closed
5/14/2011	10:40:20 PM	SiCl4 pre valve closed
5/14/2011	10:40:20 PM	SiCl4 post valve closed
5/14/2011	10:40:20 PM	Bubbler valve closed
5/14/2011	10:40:20 PM	Main Vac valve opened
5/14/2011	10:40:20 PM	Bypass valve opened
5/14/2011	10:40:20 PM	Helium MFC set to  0.000000
5/14/2011	10:40:20 PM	H2 MFC set to  0.000000
5/14/2011	10:40:20 PM	BCl3 MFC set to  0.000000
5/14/2011	10:40:20 PM	PHl3 MFC set to  0.000000
5/14/2011	10:40:20 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:40:20 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:40:20 PM	Tube furnace set to 0
5/14/2011	10:41:20 PM	H2 valve closed
5/14/2011	10:41:20 PM	BCl3 valve closed
5/14/2011	10:41:20 PM	PH3 valve closed
5/14/2011	10:41:20 PM	SiCl4 pre valve closed
5/14/2011	10:41:20 PM	SiCl4 post valve closed
5/14/2011	10:41:20 PM	Bubbler valve closed
5/14/2011	10:41:20 PM	Helium valve opened
5/14/2011	10:41:20 PM	Main Vac valve opened
5/14/2011	10:41:20 PM	Bypass valve opened
5/14/2011	10:41:20 PM	Helium MFC set to  100.000000
5/14/2011	10:41:20 PM	H2 MFC set to  0.000000
5/14/2011	10:41:20 PM	BCl3 MFC set to  0.000000
5/14/2011	10:41:20 PM	PHl3 MFC set to  0.000000
5/14/2011	10:41:20 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:41:20 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:41:20 PM	Tube furnace set to 0
5/14/2011	10:42:20 PM	Helium valve closed
5/14/2011	10:42:20 PM	H2 valve closed
5/14/2011	10:42:20 PM	BCl3 valve closed
5/14/2011	10:42:20 PM	PH3 valve closed
5/14/2011	10:42:20 PM	SiCl4 pre valve closed
5/14/2011	10:42:20 PM	SiCl4 post valve closed
5/14/2011	10:42:20 PM	Bubbler valve closed
5/14/2011	10:42:20 PM	Main Vac valve opened
5/14/2011	10:42:20 PM	Bypass valve opened
5/14/2011	10:42:20 PM	Helium MFC set to  0.000000
5/14/2011	10:42:20 PM	H2 MFC set to  0.000000
5/14/2011	10:42:20 PM	BCl3 MFC set to  0.000000
5/14/2011	10:42:20 PM	PHl3 MFC set to  0.000000
5/14/2011	10:42:20 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:42:20 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:42:20 PM	Tube furnace set to 0
5/14/2011	10:43:20 PM	H2 valve closed
5/14/2011	10:43:20 PM	BCl3 valve closed
5/14/2011	10:43:20 PM	PH3 valve closed
5/14/2011	10:43:20 PM	SiCl4 pre valve closed
5/14/2011	10:43:20 PM	SiCl4 post valve closed
5/14/2011	10:43:20 PM	Bubbler valve closed
5/14/2011	10:43:20 PM	Helium valve opened
5/14/2011	10:43:20 PM	Main Vac valve opened
5/14/2011	10:43:20 PM	Bypass valve opened
5/14/2011	10:43:20 PM	Helium MFC set to  100.000000
5/14/2011	10:43:20 PM	H2 MFC set to  0.000000
5/14/2011	10:43:20 PM	BCl3 MFC set to  0.000000
5/14/2011	10:43:20 PM	PHl3 MFC set to  0.000000
5/14/2011	10:43:20 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:43:20 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:43:20 PM	Tube furnace set to 0
5/14/2011	10:44:20 PM	Helium valve closed
5/14/2011	10:44:20 PM	H2 valve closed
5/14/2011	10:44:20 PM	BCl3 valve closed
5/14/2011	10:44:20 PM	PH3 valve closed
5/14/2011	10:44:20 PM	SiCl4 pre valve closed
5/14/2011	10:44:20 PM	SiCl4 post valve closed
5/14/2011	10:44:20 PM	Bubbler valve closed
5/14/2011	10:44:20 PM	Main Vac valve opened
5/14/2011	10:44:20 PM	Bypass valve opened
5/14/2011	10:44:20 PM	Helium MFC set to  0.000000
5/14/2011	10:44:20 PM	H2 MFC set to  0.000000
5/14/2011	10:44:20 PM	BCl3 MFC set to  0.000000
5/14/2011	10:44:20 PM	PHl3 MFC set to  0.000000
5/14/2011	10:44:20 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:44:20 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:44:21 PM	Tube furnace set to 0
5/14/2011	10:45:21 PM	H2 valve closed
5/14/2011	10:45:21 PM	BCl3 valve closed
5/14/2011	10:45:21 PM	PH3 valve closed
5/14/2011	10:45:21 PM	SiCl4 pre valve closed
5/14/2011	10:45:21 PM	SiCl4 post valve closed
5/14/2011	10:45:21 PM	Bubbler valve closed
5/14/2011	10:45:21 PM	Helium valve opened
5/14/2011	10:45:21 PM	Main Vac valve opened
5/14/2011	10:45:21 PM	Bypass valve opened
5/14/2011	10:45:21 PM	Helium MFC set to  100.000000
5/14/2011	10:45:21 PM	H2 MFC set to  0.000000
5/14/2011	10:45:21 PM	BCl3 MFC set to  0.000000
5/14/2011	10:45:21 PM	PHl3 MFC set to  0.000000
5/14/2011	10:45:21 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:45:21 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:45:21 PM	Tube furnace set to 0
5/14/2011	10:46:21 PM	Helium valve closed
5/14/2011	10:46:21 PM	H2 valve closed
5/14/2011	10:46:21 PM	BCl3 valve closed
5/14/2011	10:46:21 PM	PH3 valve closed
5/14/2011	10:46:21 PM	SiCl4 pre valve closed
5/14/2011	10:46:21 PM	SiCl4 post valve closed
5/14/2011	10:46:21 PM	Bubbler valve closed
5/14/2011	10:46:21 PM	Main Vac valve opened
5/14/2011	10:46:21 PM	Bypass valve opened
5/14/2011	10:46:21 PM	Helium MFC set to  0.000000
5/14/2011	10:46:21 PM	H2 MFC set to  0.000000
5/14/2011	10:46:21 PM	BCl3 MFC set to  0.000000
5/14/2011	10:46:21 PM	PHl3 MFC set to  0.000000
5/14/2011	10:46:21 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:46:21 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:46:21 PM	Tube furnace set to 0
5/14/2011	10:47:04 PM	Run aborted at 10:47 PM
5/14/2011	10:47:04 PM	Helium valve closed
5/14/2011	10:47:04 PM	H2 valve closed
5/14/2011	10:47:04 PM	BCl3 valve closed
5/14/2011	10:47:04 PM	PH3 valve closed
5/14/2011	10:47:04 PM	SiCl4 pre valve closed
5/14/2011	10:47:04 PM	SiCl4 post valve closed
5/14/2011	10:47:04 PM	Bypass valve closed
5/14/2011	10:47:04 PM	Main Vac valve closed
5/14/2011	10:47:04 PM	Bubbler valve closed
5/14/2011	10:47:04 PM	Helium MFC set to  0.000000
5/14/2011	10:47:04 PM	H2 MFC set to  0.000000
5/14/2011	10:47:04 PM	BCl3 MFC set to  0.000000
5/14/2011	10:47:04 PM	PHl3 MFC set to  0.000000
5/14/2011	10:47:04 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:47:04 PM	Tube furnace set to 0
5/14/2011	10:47:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/14/2011	10:47:09 PM	Recipe started at 10:47 PM
5/14/2011	10:47:09 PM	Helium valve closed
5/14/2011	10:47:09 PM	BCl3 valve closed
5/14/2011	10:47:09 PM	PH3 valve closed
5/14/2011	10:47:09 PM	SiCl4 pre valve closed
5/14/2011	10:47:09 PM	SiCl4 post valve closed
5/14/2011	10:47:09 PM	Main Vac valve closed
5/14/2011	10:47:09 PM	Bypass valve closed
5/14/2011	10:47:09 PM	Bubbler valve closed
5/14/2011	10:47:09 PM	H2 valve opened
5/14/2011	10:47:09 PM	Helium MFC set to  0.000000
5/14/2011	10:47:09 PM	H2 MFC set to  500.000000
5/14/2011	10:47:09 PM	BCl3 MFC set to  0.000000
5/14/2011	10:47:09 PM	PHl3 MFC set to  0.000000
5/14/2011	10:47:09 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:47:09 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:47:09 PM	Tube furnace set to 0
5/14/2011	10:48:28 PM	Helium valve closed
5/14/2011	10:48:28 PM	BCl3 valve closed
5/14/2011	10:48:28 PM	PH3 valve closed
5/14/2011	10:48:28 PM	SiCl4 pre valve closed
5/14/2011	10:48:28 PM	SiCl4 post valve closed
5/14/2011	10:48:28 PM	Main Vac valve closed
5/14/2011	10:48:28 PM	Bypass valve closed
5/14/2011	10:48:28 PM	H2 valve opened
5/14/2011	10:48:28 PM	Bubbler valve opened
5/14/2011	10:48:28 PM	Helium MFC set to  0.000000
5/14/2011	10:48:28 PM	H2 MFC set to  500.000000
5/14/2011	10:48:28 PM	BCl3 MFC set to  0.000000
5/14/2011	10:48:28 PM	PHl3 MFC set to  0.000000
5/14/2011	10:48:28 PM	SiCl4 MFC set to  0.000000
5/14/2011	10:48:28 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	10:48:28 PM	Tube furnace set to 1000
5/14/2011	11:08:28 PM	Helium valve closed
5/14/2011	11:08:28 PM	BCl3 valve closed
5/14/2011	11:08:28 PM	Main Vac valve closed
5/14/2011	11:08:28 PM	Bypass valve closed
5/14/2011	11:08:28 PM	H2 valve opened
5/14/2011	11:08:28 PM	PH3 valve opened
5/14/2011	11:08:28 PM	SiCl4 pre valve opened
5/14/2011	11:08:28 PM	SiCl4 post valve opened
5/14/2011	11:08:28 PM	Bubbler valve opened
5/14/2011	11:08:28 PM	Helium MFC set to  0.000000
5/14/2011	11:08:28 PM	H2 MFC set to  500.000000
5/14/2011	11:08:28 PM	BCl3 MFC set to  0.000000
5/14/2011	11:08:28 PM	PHl3 MFC set to  1.000000
5/14/2011	11:08:28 PM	SiCl4 MFC set to  50.000000
5/14/2011	11:08:28 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	11:08:28 PM	Tube furnace set to 1000
5/14/2011	11:24:28 PM	H2 valve closed
5/14/2011	11:24:28 PM	BCl3 valve closed
5/14/2011	11:24:28 PM	PH3 valve closed
5/14/2011	11:24:28 PM	SiCl4 pre valve closed
5/14/2011	11:24:28 PM	SiCl4 post valve closed
5/14/2011	11:24:28 PM	Main Vac valve closed
5/14/2011	11:24:28 PM	Bypass valve closed
5/14/2011	11:24:28 PM	Helium valve opened
5/14/2011	11:24:28 PM	Bubbler valve opened
5/14/2011	11:24:28 PM	Helium MFC set to  500.000000
5/14/2011	11:24:28 PM	H2 MFC set to  0.000000
5/14/2011	11:24:28 PM	BCl3 MFC set to  0.000000
5/14/2011	11:24:28 PM	PHl3 MFC set to  0.000000
5/14/2011	11:24:28 PM	SiCl4 MFC set to  0.000000
5/14/2011	11:24:28 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	11:24:28 PM	Tube furnace set to 0
5/14/2011	11:44:28 PM	Helium valve closed
5/14/2011	11:44:28 PM	H2 valve closed
5/14/2011	11:44:28 PM	BCl3 valve closed
5/14/2011	11:44:28 PM	PH3 valve closed
5/14/2011	11:44:28 PM	SiCl4 pre valve closed
5/14/2011	11:44:28 PM	SiCl4 post valve closed
5/14/2011	11:44:28 PM	Main Vac valve closed
5/14/2011	11:44:28 PM	Bypass valve closed
5/14/2011	11:44:28 PM	Bubbler valve closed
5/14/2011	11:44:28 PM	Helium MFC set to  0.000000
5/14/2011	11:44:28 PM	H2 MFC set to  0.000000
5/14/2011	11:44:28 PM	BCl3 MFC set to  0.000000
5/14/2011	11:44:28 PM	PHl3 MFC set to  0.000000
5/14/2011	11:44:28 PM	SiCl4 MFC set to  0.000000
5/14/2011	11:44:28 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	11:44:28 PM	Tube furnace set to 0
5/14/2011	11:44:29 PM	Run finished at 11:44 PM
5/14/2011	11:51:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2011	11:51:12 PM	Recipe started at 11:51 PM
5/14/2011	11:51:12 PM	H2 valve closed
5/14/2011	11:51:12 PM	BCl3 valve closed
5/14/2011	11:51:12 PM	PH3 valve closed
5/14/2011	11:51:12 PM	SiCl4 pre valve closed
5/14/2011	11:51:12 PM	SiCl4 post valve closed
5/14/2011	11:51:12 PM	Main Vac valve closed
5/14/2011	11:51:12 PM	Bypass valve closed
5/14/2011	11:51:12 PM	Bubbler valve closed
5/14/2011	11:51:12 PM	Helium valve opened
5/14/2011	11:51:12 PM	Helium MFC set to  500.000000
5/14/2011	11:51:12 PM	H2 MFC set to  0.000000
5/14/2011	11:51:12 PM	BCl3 MFC set to  0.000000
5/14/2011	11:51:12 PM	PHl3 MFC set to  0.000000
5/14/2011	11:51:12 PM	SiCl4 MFC set to  0.000000
5/14/2011	11:51:12 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	11:51:12 PM	Tube furnace set to 0
5/14/2011	11:51:15 PM	Helium valve closed
5/14/2011	11:51:15 PM	H2 valve closed
5/14/2011	11:51:15 PM	BCl3 valve closed
5/14/2011	11:51:15 PM	PH3 valve closed
5/14/2011	11:51:15 PM	SiCl4 pre valve closed
5/14/2011	11:51:15 PM	SiCl4 post valve closed
5/14/2011	11:51:15 PM	Main Vac valve closed
5/14/2011	11:51:15 PM	Bypass valve closed
5/14/2011	11:51:15 PM	Bubbler valve closed
5/14/2011	11:51:15 PM	Helium MFC set to  0.000000
5/14/2011	11:51:15 PM	H2 MFC set to  0.000000
5/14/2011	11:51:15 PM	BCl3 MFC set to  0.000000
5/14/2011	11:51:15 PM	PHl3 MFC set to  0.000000
5/14/2011	11:51:15 PM	SiCl4 MFC set to  0.000000
5/14/2011	11:51:15 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	11:51:15 PM	Tube furnace set to 0
5/14/2011	11:51:15 PM	Run finished at 11:51 PM
5/14/2011	11:51:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/14/2011	11:56:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/14/2011	11:56:37 PM	Recipe started at 11:56 PM
5/14/2011	11:56:37 PM	Helium valve closed
5/14/2011	11:56:37 PM	H2 valve closed
5/14/2011	11:56:37 PM	BCl3 valve closed
5/14/2011	11:56:37 PM	PH3 valve closed
5/14/2011	11:56:37 PM	SiCl4 pre valve closed
5/14/2011	11:56:37 PM	SiCl4 post valve closed
5/14/2011	11:56:37 PM	Main Vac valve closed
5/14/2011	11:56:37 PM	Bubbler valve closed
5/14/2011	11:56:37 PM	Bypass valve opened
5/14/2011	11:56:37 PM	Helium MFC set to  0.000000
5/14/2011	11:56:37 PM	H2 MFC set to  0.000000
5/14/2011	11:56:37 PM	BCl3 MFC set to  0.000000
5/14/2011	11:56:37 PM	PHl3 MFC set to  0.000000
5/14/2011	11:56:37 PM	SiCl4 MFC set to  0.000000
5/14/2011	11:56:37 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	11:56:37 PM	Tube furnace set to 0
5/14/2011	11:57:09 PM	Helium valve closed
5/14/2011	11:57:09 PM	H2 valve closed
5/14/2011	11:57:09 PM	BCl3 valve closed
5/14/2011	11:57:09 PM	PH3 valve closed
5/14/2011	11:57:09 PM	SiCl4 pre valve closed
5/14/2011	11:57:09 PM	SiCl4 post valve closed
5/14/2011	11:57:09 PM	Bubbler valve closed
5/14/2011	11:57:09 PM	Main Vac valve opened
5/14/2011	11:57:09 PM	Bypass valve opened
5/14/2011	11:57:09 PM	Helium MFC set to  0.000000
5/14/2011	11:57:09 PM	H2 MFC set to  0.000000
5/14/2011	11:57:09 PM	BCl3 MFC set to  0.000000
5/14/2011	11:57:09 PM	PHl3 MFC set to  0.000000
5/14/2011	11:57:09 PM	SiCl4 MFC set to  0.000000
5/14/2011	11:57:09 PM	Bypass solenoid MFC set to  0.000000
5/14/2011	11:57:09 PM	Tube furnace set to 0
5/14/2011	11:57:09 PM	Run finished at 11:57 PM
5/14/2011	11:57:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
